Micromechanical switches fabricated using nickel surface micromachining

Journal of Microelectromechanical Systems

Volumn 6, Issue 1, 1997, Pages 3-9

  Zavracky, Paul M ^a,b,c,d,e,f   Majumder, Sumit ^a,g   McGruer, Nicol E ^a,h,i,j,k  

^a NORTHEASTERN UNIVERSITY   (United States)

^b TUFTS UNIVERSITY   (United States)

^c KOPIN CORPORATION   (United States)

^d Invensys Process Systems USA   (United States)

^e Coulter Corporation ^*  (United States)

^f MIT LINCOLN LABORATORY   (United States)

^g INDIAN INSTITUTE OF TECHNOLOGY KANPUR   (India)

^h MICHIGAN STATE UNIVERSITY   (United States)

ⁱ Scanning Electron Microsc Facility

^j Scanning Electron Microsc Facility ^*  (United States)

^k Vacuum Microelectronics Group

more..

Author keywords

Contacts; Nickel surface micromachining; Relays

Indexed keywords

ELECTRIC CONTACTS; ELECTRIC CURRENTS; ELECTRIC POWER SUPPLIES TO APPARATUS; ELECTRIC RELAYS; ELECTRIC RESISTANCE; ELECTRIC SWITCHES; MICROMACHINING; NICKEL; NUMERICAL ANALYSIS;

INITIAL CONTACT RESISTANCE; MICROMECHANICAL SWITCHES; NICKEL SURFACE MICROMACHINING; THRESHOLD VOLTAGE;

MICROELECTROMECHANICAL DEVICES;

EID: 0031098105     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.557524     Document Type: Article

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