Temperature dependence of asperity contact and contact resistance in gold RF MEMS switches

Journal of Micromechanics and Microengineering

Volumn 19, Issue 2, 2009, Pages

  Brown, C ^a   Rezvanian, O ^b   Zikry, M A ^b   Krim, J ^a  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

^b North Carolina State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; CONTACT RESISTANCE; CREEP; ELECTRIC SWITCHES; FORECASTING; FREQUENCY RESPONSE; GOLD; HEATING; MEMS; SURFACE ROUGHNESS; THREE DIMENSIONAL;

AFM; ASPERITY CONTACTS; CONSTRICTION RESISTANCES; CONTACT AREAS; CONTACT VOLTAGES; CREEP DEFORMATIONS; CREEP MECHANISMS; CREEP RATES; ELECTRO-MECHANICAL RESPONSE; EXPERIMENTAL DATUM; EXPERIMENTAL MEASUREMENTS; GOLD CONTACTS; MICRO-CONTACTS; MODELING PREDICTIONS; PER UNITS; RADIO FREQUENCY MICRO ELECTROMECHANICAL SYSTEMS; REAL CONTACT AREAS; RESISTANCE DROPS; RESISTANCE INCREASE; RESISTANCE MEASUREMENTS; RF-MEMS SWITCHES; SWITCH CONTACTS; TEMPERATURE DEPENDENCES; THREE-DIMENSIONAL SURFACES; TIME-DEPENDENT DEFORMATIONS; TOP CONTACTS;

MICROELECTROMECHANICAL DEVICES;

EID: 61849183146     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/2/025006     Document Type: Article

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