Ripple topography and roughness evolution on surface of polycrystalline gold and silver thin films under low energy Ar-ion beam sputtering

Applied Surface Science

Volumn 258, Issue 19, 2012, Pages 7717-7725

  Gailly, Patrick ^a   Petermann, Claire ^a,b,c   Tihon, Pierre ^a,d   Fleury Frenette, Karl ^a  

^a UNIVERSITY OF LIÈGE   (Belgium)

^b UNIVERSITÉ DE STRASBOURG   (France)

^c KU LEUVEN   (Belgium)

^d UNIVERSITY OF MONS   (Belgium)

Author keywords

Ion beam figuring; Metallic thin films; Ripples; Roughness; Sputtering; Topography

Indexed keywords

GOLD; IONS; SILVER; SPUTTERING; SURFACE ROUGHNESS; THIN FILMS; TOPOGRAPHY;

EXPERIMENTAL CONDITIONS; ION BEAM FIGURING; ION-BEAM SPUTTERING; METALLIC THIN FILMS; POLYCRYSTALLINE GOLD; RIPPLES; SPONTANEOUS FORMATION; TECHNOLOGICAL APPLICATIONS;

ION BEAMS;

EID: 84861344592     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2012.04.129     Document Type: Article

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