Self-assembled monolayers as anti-stiction coatings for MEMS: Characteristics and recent developments

Sensors and Actuators, A: Physical

Volumn 82, Issue 1, 2000, Pages 219-223

  Maboudian, Roya ^a   Ashurst, W Robert ^a   Carraro, Carlo ^a  

^a University of California   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; COATINGS; CRYSTAL MICROSTRUCTURE; ELECTRIC CURRENTS; FRICTION; MONOLAYERS; STICTION;

ANTI-STICTION COATINGS; SELF-ASSEMBLED MONOLAYERS (SAM);

MICROELECTROMECHANICAL DEVICES;

EID: 0033742679     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00337-4     Document Type: Article

References (23)

1. Mastrangelo C.H. Adhesion-related failure mechanisms in micromechanical devices. Tribol. Lett. 3:1997;223.
2. Tas N., Sonnenberg T., Jansen H., Legtenberg R., Elwenspoek M. Stiction in surface micro-machining. J. Micromech. Microeng. 6:1996;385.
3. Rymuza Z. Control tribological and mechanical properties of MEMS surfaces. Part 1: critical review. Microsystem Technologies. 5:1999;173.
4. Maboudian R. Surface processes in MEMS technology. Surf. Sci. Rep. 30:1998;209.
5. Maboudian R. Adhesion and friction issues associated with reliable operation of MEMS. Mater. Res. Soc. Bull. 23:1998;47.
6. Maboudian R., Howe R.T. Critical review: adhesion in surface micromechanical structures. J. Vac. Sci. Technol. B. 15:1997;1.
7. Maboudian R., Howe R.T. Stiction reduction processes for surface micromachines. Tribol. Lett. 3:1997;215.
8. Henck S. Lubrication of digital micromirror devices. Tribol. Lett. 3:1997;239.
9. Miller S., Sniegowski J.J., LaVigne G., McWorther P.J. Friction in surface micromachined microengines. Proc. SPIE Smart Electronics and MEMS. 2722:1996;197.
10. M.R. Houston, R. Maboudian, R.T. Howe, Self-assembled monolayer films as durable anti-stiction coatings for polysilicon microstructures, Proc. 1996 Solid-State Sens. Act. Workshop, Hilton Head '96, 1996, p. 42.
11. U. Srinivasan, M.R. Houston, R.T. Howe, R. Maboudian, Self-assembled fluorocarbon films for enhanced stiction reduction, Proc. 9th Int. Conf. Solid-State Sens. Act., Transducers '97, 1997, p. 210.
12. Srinivasan U., Houston M.R., Howe R.T., Maboudian R. Alkylsiloxane-based self-assembled monolayers for stiction reduction in silicon micromachines. J. MEMS. 7:1998;252.
13. Deng K., Collins R.J., Mehregany M., Sukenik C.N. Performance impact of monolayer coating of polysilicon micromotors. J. Electrochem. Soc. 142:1995;1278.
14. U. Srinivasan, J.D. Foster, U. Habib, R.T. Howe, R. Maboudian, D.C. Senft, M.T. Dugger, Lubrication of polysilicon micromechanisms with alkylsiloxane self-assembled monolayers, Proc. 1998 Solid-State Sens. Act. Workshop, Hilton Head '98, 1998, p. 156.
15. C. Cabuz, E.I. Cabuz, T.R. Ohnstein, J. Neus, R. Maboudian, High reliability touch-mode electrostatic actuators (TMEA), Proc. 1998 Solid-State Sens. Act. Workshop, Hilton Head '98, 1998, p. 296.
16. C. Cabuz, E.I. Cabuz, T.R. Ohnstein, J. Neus, R. Maboudian Factors affecting the reliability of touch-mode electrostatic actuators, Sens. Actuators, A, in press.
17. A. Ulman, An Introduction to Ultrathin Organic Films, Acadamic Press, San Diego, 1991.
18. Parikh A.N., Allara D.L., Azouz I.B., Rondelez F. An intrinsic relationship between molecular structure in self-assembled n-alkylsiloxane monolayers and deposition temperature. J. Phys. Chem. 98:1994;7577.
19. Carraro C., Yauw O., Sung M.M., Maboudian R. Observation of three growth mechanisms in self-assembled monolayers. J. Phys. Chem. 102:1998;4441.
20. C.H. Mastrangelo, C.H. Hsu, A simple experimental technique for the measurement of the work of adhesion of microstructures, Proc. IEEE Solid-State Sensor Actuator Workshop, Hilton Head, SC, USA, 1992, p. 208.
21. M.G. Lim, R.T. Howe, R.M. White, Proc. IEEE MEMS Workshop, Napa Valley, CA, USA, 1990, pp. 82-88.
22. M.G. Lim, Masters Thesis, Univ. of California at Berkeley, Berkeley CA, 1990.
23. Senft D.C., Dugger M.T. Friction and wear in surface micromachined tribological test devices. Proc. SPIE. 3224:1997;31-38.