Continuous anti-stiction coatings using self-assembled monolayers for gold microstructures

Journal of Micromechanics and Microengineering

Volumn 12, Issue 5, 2002, Pages 688-695

  Kim, Jung Mu ^a   Baek, Chang Wook ^a   Park, Jae Hyoung ^a   Shin, Dong Sik ^a   Lee, Yoon Sik ^a   Kim, Yong Kweon ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CONTACT ANGLE; DROP FORMATION; ELECTROPLATING; GOLD; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; PROTECTIVE COATINGS; SELF ASSEMBLY; SILICON NITRIDE; SURFACE ROUGHNESS;

ANTI-STICTION COATINGS; RADIO FREQUENCY MICROELECTROMECHANICAL SYSTEM; SELF ASSEMBLED MONOLAYERS;

MONOLAYERS;

EID: 0036732393     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/12/5/327     Document Type: Article

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