Hybrid simulation of a dc-enhanced radio-frequency capacitive discharge in hydrogen

Journal of Physics D: Applied Physics

Volumn 45, Issue 17, 2012, Pages

  Diomede, P ^a   Longo, S ^b,c   Economou, D J ^a   Capitelli, M ^b,c  

^a UNIVERSITY OF HOUSTON   (United States)

^b UNIVERSITY OF BARI   (Italy)

^c CNR   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ABSOLUTE VALUES; APPLIED DC-VOLTAGE; CAPACITIVE DISCHARGES; CAPACITIVELY COUPLED; CHARGING DAMAGE; CONTINUOUS WAVES; DC BIAS; DC BIAS VOLTAGE; DC VOLTAGE; ELECTRON ENERGY DISTRIBUTION FUNCTIONS; ENERGETIC ELECTRON; ENERGY DISTRIBUTIONS; EXPERIMENTAL DATA; HIGH ASPECT RATIO; HYBRID MODEL; HYBRID SIMULATION; ION ENERGY DISTRIBUTIONS; MOLECULAR HYDROGEN; NORMAL INCIDENCE; PARALLEL PLATES; PULSED PLASMA; RADIO FREQUENCIES; RADIO FREQUENCY DISCHARGES; RF VOLTAGE; SECONDARY ELECTRONS; TIME WINDOWS; VIBRATIONAL DISTRIBUTION; VIBRATIONAL QUANTUM NUMBER;

ASPECT RATIO; BIAS VOLTAGE; HYDROGEN; PLASMAS; QUANTUM THEORY;

ELECTRIC DISCHARGES;

EID: 84859758894     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/45/17/175204     Document Type: Article

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