Particle-in-cell/Monte Carlo simulations of a low-pressure capacitively coupled radio-frequency discharge: Effect of adding H2 to an Ar discharge

Journal of Applied Physics

Volumn 93, Issue 9, 2003, Pages 5025-5033

  Neyts, E ^a   Yan, M ^a   Bogaerts, A ^a   Gijbels, R ^a  

^a UNIVERSITY OF ANTWERP   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; COMPUTER SIMULATION; ELECTRIC POTENTIAL; ELECTRON ENERGY LEVELS; HYDROGEN; POSITIVE IONS;

RADIO-FREQUENCY DISCHARGES;

ELECTRIC DISCHARGES;

EID: 0038663128     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1563820     Document Type: Article

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