Control of ion energy distributions using a pulsed plasma with synchronous bias on a boundary electrode

Plasma Sources Science and Technology

Volumn 20, Issue 5, 2011, Pages

  Shin, Hyungjoo ^a   Zhu, Weiye ^a   Xu, Lin ^a,b   Donnelly, Vincent M ^a   Economou, Demetre J ^a  

^a UNIVERSITY OF HOUSTON   (United States)

^b LAM RESEARCH CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

APPLIED BIAS; BOUNDARY ELECTRODES; CONTINUOUS WAVE; DC BIAS; DC BIAS VOLTAGE; DISCHARGE PRESSURES; FIELD ENERGY; GROUNDED SUBSTRATES; ION ENERGY DISTRIBUTIONS; MEAN ENERGY; PEAK SEPARATIONS; PLASMA PARAMETER; PLASMA POTENTIAL; PULSED PLASMA; TIME WINDOWS; TIME-RESOLVED;

ELECTRIC POWER DISTRIBUTION; FULL WIDTH AT HALF MAXIMUM; INDUCTIVELY COUPLED PLASMA; PLASMA DEVICES; PLASMA SOURCES;

ELECTRIC DISCHARGES;

EID: 80053612131     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/20/5/055001     Document Type: Article

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