Fluid and kinetic models of the low temperature H2 plasma produced by a radio-frequency reactor

Physics of Plasmas

Volumn 15, Issue 10, 2008, Pages

  Diomede, P ^a   Michau, A ^b   Redolfi, M ^b   Morscheidt, W ^c   Hassouni, K ^b   Longo, S ^a,d   Capitelli, M ^a,d  

^a UNIVERSITY OF BARI   (Italy)

^b UNIVERSITÉ PARIS 13   (France)

^c SORBONNE UNIVERSITÉ   (France)

^d CNR   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC FIELDS; PLASMAS; POISSON EQUATION;

ATOMIC DENSITIES; CAPACITIVELY COUPLED; CHARGED SPECIES; COMPARATIVE STUDIES; ELECTRON ENERGIES; ELECTRONIC GROUND STATES; IONIC SPECIES; KINETIC MODELS; LOW TEMPERATURES; MODEL COMPARISONS; MULTICOMPONENT PLASMAS; NUMERICAL SIMULATIONS; PARALLEL PLATES; RF DISCHARGES; SPACE DIMENSIONS; STATE DENSITIES; TEST CASES; TIME VARIATIONS; VIBRATIONAL DISTRIBUTIONS; VIBRATIONAL KINETICS;

ELECTRIC DISCHARGES;

EID: 55149113988     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3006152     Document Type: Article

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