Two-dimensional fluid modelling of charged particle transport in radio-frequency capacitively coupled discharges

Plasma Sources Science and Technology

Volumn 11, Issue 4, 2002, Pages 448-465

  Salabas, A ^a   Gousset, G ^b   Alves, L L ^a  

^a INSTITUTO SUPERIOR TÉCNICO   (Portugal)

^b UNIVERSITÉ PARIS SUD   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC FIELDS; ELECTRIC POTENTIAL; ELECTRON TRANSPORT PROPERTIES; MAXWELL EQUATIONS; POISSON DISTRIBUTION; REACTION KINETICS;

ION MOMENTUM TRANSFER;

CHARGED PARTICLES;

EID: 0036862328     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/11/4/312     Document Type: Review

References (102)

1. Graves D.B. and Jensen K.F. 1986 IEEE Trans. Plasma Sci. PS-14 78.
2. Boeuf J.P. 1987 Phys. Rev. A. 36 2782.
3. Graves D.B. 1987 J. Appl. Phys. 62 88.
4. Richards A.D., Thompson B.E. and Sawin H.H. 1987 Appl. Phys. Lett. 50 492.
5. Barnes M.S., Colter T.J. and Elta M.E. 1988 J. Comput. Phys. 77 53.
6. Gogolides E., Nicolai J.P. and Sawin H.H. 1989 J. Vac. Sci. Technol. A. 7 1001.
7. Okazaki K., Makabe T. and Yamaguchi Y. 1989 Appl. Phys. Lett. 54 1742.
8. Belenguer Ph. and Boeuf J.P. 1990 Phys. Rev. A. 41 4447.
9. Surendra M., Graves D.B. and MCJellum G. 1990 Phys. Rev. A 41 1112.
10. Oh Y.H., Choi N.H. and Choi D.I 1990 J. Appl. Phys. 67 3264.
11. Meyyappan M. and Kreskovsky J.P. 1990 J. Appl. Phys. 68 1506.
12. Park S.K. and Economou D.J. 1990 J. Appl. Phys. 68 3904.
13. Meyyappan M. and Govindan T.R. 1991 IEEE Trans. Plasma Sci. PS-19 122.
14. Surendra M., Graves D.B. and Plano L.S. 1992 J. Appl. Phys. 71 5189.
15. Makabe T. Nakano N. and Yamagushi Y. 1992 Phys. Rev. A. 45 2520.
16. Gogolides E. and Sawin H.H. 1992 J. Appl. Phys. 72 3971.
17. Passchier J.D.P. and Goedheer W.J. 1993 J. Appl. Phys. 73 1073.
18. Meyyappan M. and Govindan T.R. 1993 J. Appl. Phys. 74 225C.
19. Lymberopoulos D.P. and Economou D.J. 1993 J. Appl. Phys. 73 3668.
20. Nitschke T.E. and Graves D.B. 1994 J. Appl. Phys. 76 5646.
21. Boeuf J.P. and Pitchford L.C. 1995 SIGLO-RF, a 1D User-Friendly Model for RF Discharge Simulation (Kinema Software, siglo@kinema.com, http://www.csn.net/slo, Monument, CO).
22. Nienhuis G.J., Goedheer W.J., Hamers E.A.G., van Stark W.G.J.H.M. and Bezemer J. 1997 J. Appl. Phys. 82 2060.
23. Boeuf J.P. 1988 J. Appl. Phys. 63 1342.
24. Tsai J.H. and Wu C. 1990 Phys. Rev. A. 41 5626.
25. Hashigushi S. 1992 J. Vac. Sci. Technol. A. 10 1339.
26. Dalvie M., Surendra M. and Selwyn G.S. 1993 Appl. Phys. Lett. 62 3207.
27. Young F.F and Wu C.H. 1993 IEEE Trans. Plasma Sci. PS-21 312.
28. Passchier J.D.P. and Goedheer W.J. 1993 J. Appl. Phys. 74 3744.
29. Lymberopoulos D.P. and Economou D.J. 1993 Appl. Phys. Lett. 63 2478.
30. Lymberopoulos D.P. and Economou D.J. 1994 J. Vac. Sci. Technol. A. 12 1229.
31. Lymberopoulos D.P. and Economou D.J. 1995 J. Res. Natl. Stand. Technol. 100 473.
32. Lymberopoulos D.P. and Economou D.J. 1995 J. Phys. D 28 727.
33. Goedheer W.J., Meijer P.M., Bezemer J., Passchier J.D.P. and van Sark W.G.J.H.M. 1995 IEEE Trans. Plasma Sci. PS-23 644.
34. Boeuf J.P. and Pitchford L.C. 1995 Phys. Rev. E 51 1376.
35. Boeuf J.P. and Pitchford L.C. 1996 SIGLO-2D, a 2D User-Friendly Model for Glow Discharge Simulation (Kinema Software, siglo@kinema.com, http://www.csn.net/siglo, Monument, CO).
36. Leroy O. 1996 PhD Thesis Université Paris-Sud.
37. Leroy O., Gousset G., Alves L.L., Perrin J. and Jolly J. 1998 Plasma Sources Sci. Technol. 7 348.
38. Boswell R. and Morey I.J. 1988 Appl. Phys. Lett. 52 21.
39. Surendra M., Graves D.B. and Morey I.J. 1990 Appl. Phys. Lett. 56 1022.
40. Vender D. and Boswell R.W. 1990 IEEE Trans. Plasma Sci. PS-18 725.
41. Birdsall C.K. 1991 IEEE Trans. Plasma Sci. PS-19 65.
42. Surendra M. and Graves D.B. 1991 IEEE Trans. Plasma Sci. PS-19 144.
43. Boeuf J.P. and Belenguer Ph 1992 J. Appl. Phys. 71 4751.
44. Date H., Kitamori K. and Tagashira H. 1992 J. Phys. D 25 442.
45. Vahedi V., DiPeso G., Birdsall C.K., Lieberman M.A. and Rognlien T.D. 1993 Plasma Source Sci. Technol. 2 261.
46. Vahedi V., Birdsall C.K., Lieberman M.A., DiPeso G. and Rognlien T.D. 1993 Plasma Source Sci. Technol. 2 273.
47. Vahedi V., Birdsall C.K., Lieberman M.A., DiPeso G. and Rognlien T.D. 1993 Phys. Fluids B. 5 2719.
48. Yan M. and Goedheer W.J. 1999 Plasma Source Sci. Technol. 8 349.
49. Golant V.E., Zhilinsky A.P. and Sakharov I.E. 1980 Fundamentals of Plasma Physics ed S.C. Brown (New York: Wiley).
50. Kushner M.J. 1988 J. Appl. Phys. 63 2532.
51. Sommerer T.J. and Kushner M.J. 1992 J. Appl. Phys. 71 1654.
52. Choi S.J., Ventzek P.L., Hoekstra R.J. and Kushner M.J. 1994 Plasma Source Sci. Technol. 3 418.
53. Meijer P.M., Goedheer W.J. and Passchier J.D.P. 1992 Phys. Rev. A. 45 1098.
54. Boeuf J.P., Belenguer Ph and Hbid T. 1994 Plasma Source Sci. Technol. 3 407.
55. Allis W.P. 1956 Motions of Ions and Electrons in Handbuch der Physik vol 21, ed S. Flügge (Berlin: Springer) p 383.
56. Delcroix J.L. 1966 Physique des Plasmas vol II (Paris: Dunod) chapters 11 and 12.
57. Kae-Nune P., Perrin J., Guillon J. and Jolly J. 1994 Japan. J. Appl. Phys. 33 4303.
58. Kae-Nune P., Perrin J., Guillon J. and Jolly J. 1995 Plasma Sources Sci. Technol. 4 250.
59. Sato N. and Tagashira H. 1991 IEEE Trans. Plasma Sci. PS-49 102.
60. Aires L.L., Gousset G. and Ferreira C.M. 1997 Phys. Rev. E 55 890.
61. Chanin L.M. and Biondi M.A. 1957 Phys. Rev. 106 473.
62. Bretagne J., Gousset G. and Simko T. 1994 J. Phys. D. 27 1866.
63. MCDaniel E.W. and Mason E.A. 1973 The Mobility and Diffusion of Ions in Gases (New York: Wiley).
64. Perrin J., Leroy O. and Bordage M.C. 1996 Contrib. Plasma Phys. 36 3.
65. Lieberman M.A. and A.J. Lichtenberg 1994 Principles of Plasma Discharges and Materials Processing (New York: Wiley).
66. Punset C. 1998 PhD Thesis iversité Paul Sabatier.
67. Pedoussat C. 1999 PhD Thesis Université Paul Sabatier.
68. Boeuf J.P. and Pitchford L.C. 1995 J. Phys. D 28 2083.
69. Fiala A., Pitchford L.C. and Boeuf J.P. 1994 Phys. Rev. E 49 5607.
70. Frost L.S. and Phelps A.V. 1962 Phys. Rev. 127 1621.
71. Pitchford L.C., Boeuf J.P. and Morgan W.L. 1996 BOLSIG, a 2 Term, User-Friendly Solver for the Electron Boltzmann Equation (Kinema Software, siglo@kinema.com, http://www.csn.net/siglo, Monument, CO).
72. Alves L.L. and Ferreira C.M. 1991 J. Phys. D 24 581.
73. Delcroix J.L. 1966 Physique des Plasmas vol II (Paris: Dunod), p 115.
74. Haaland P. 1990 J. Chem Phys. 93 4066.
75. Weast R.C. (ed) 1986 CRC Handbook of Chemistry and Physics 66th edn (Boca Raton, FL: Chemical Rubber).
76. Reents W.D. and Mandich M.L. 1990 J. Chem. Phys. 93 3270.
77. Simko T. Martisovits V., Bretagne J. and Gousset G. 1997 Phys. Rev. E 56 5908.
78. Phelps A.V. 1990 J. Chem. Phys. Ref. Data 19 653.
79. Ward A.L. 1962 J. Appl. Phys. 33 2789.
80. Scharfetter D.L. and Gummel H.-K. 1969 IEEE Trans. Electron. Devices 16 64.
81. Chang J.S. and Cooper G. 1970 J. Comput. Phys. 6 1.
82. Bizarro J.P.S. and Rodrigues P. 2001 Phys. Plasmas 8 1903.
83. Ventzek P.L.G., Sommerer T.J., Hoeskstra R.J. and Kushner M.J. 1993 Appl. Phys. Lett. 63 605.
84. Ventzek P.L.G., Hoeskstra R.J. and Kushner M.J. 1994 J. Vac. Sci. Technol. B. 12 461.
85. Press W.H., Flannery B.P., Teukolsky S.A. and Vetterling W.T. 1992 Numerical Recipes. The Art of Scientific Computing (Cambridge: Cambridge University Press) p 862.
86. Fletcher C.A.J. 1991 Computational Techniques for Fluids Dynamics vol I (New York: Springer) p 203.
87. Bordage M.C. 1995 PhD Thesis Université Paul Sabatier.
88. Loureiro J. and Ferreira C.M. 1989 J. Phys. D 22 1680.
89. Tawara H., Itikawa Y., Nishimura H. and Yoshino M. 1990J. Phys. Chem. Ref. Data 19 617.
90. Chatham H., Hils D., Robertson R.R. and Gallagher A.C. 1984 J. Chem. Phys. 81 1770.
91. Rapp D. and Englander-Golden P. 1965 J. Chem. Phys. 43 1464.
92. Kline L.E. 1982 IEEE Trans. Plasma Sci. PS-10 24.
93. Chan C.F. 1983 Reaction Cross-Sections and Rate Coefficients Related to the Production of Positive Ions Lawrence Berkeley Lab. Report No LBID-632.
94. Hickman A.P. 1979 J. Chem. Phys. 70 4872.
95. Henis J.M., Stewart G.W., Tripodi M.K. and Gaspar P.P. 1972 J. Chem. Phys. 57 389.
96. Chatham H. and Gallagher A. 1985 J. Appl. Phys. 58 159.
97. Allen W.W., Cheng T.M.H. and Lampe F.W. 1977 J. Chem. Phys. 66 3371.
98. Theard L.P. and Huntress W.T. Jr 1974 J. Chem. Phys. 60 2840.
99. Alves L.L., Gousset G. and Ferreira C.M. 1992 J. Phys. D 25 1713.
100. Salabas A., Gousset G. and Alves L.L. 2001 Proc. 15th International Symp. on Plasma Chemistry vol VI, ed A. Bouchoule et al (Orléans: CNRS/Université de Orléans) p 2211.
101. Heintze M. and Zedlitz R. 1996 J. Non-Cryst. Solids 198-200 1038.
102. Hammers E.A.G. 1998 PhD Thesis Utrecht University.