Particle-in-cell simulation of ion energy distributions on an electrode by applying tailored bias waveforms in the afterglow of a pulsed plasma

Journal of Applied Physics

Volumn 109, Issue 8, 2011, Pages

  Diomede, Paola ^a   Economou, Demetre J ^a   Donnelly, Vincent M ^a  

^a UNIVERSITY OF HOUSTON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON DISCHARGES; DC VOLTAGE; ELECTRON DENSITIES; ELECTRON HEATING; ENERGY OF IONS; ION ENERGY DISTRIBUTIONS; MONTE CARLO COLLISION; PARTICLE-IN-CELL SIMULATIONS; PULSED-PLASMA; VOLTAGE WAVEFORMS; WAVE FORMS;

COLLISIONAL PLASMAS; ELECTRIC POWER DISTRIBUTION; ION BEAMS; IONS; PARTICLE BEAM DYNAMICS; PLASMA SOURCES; PLASMA THEORY;

ELECTRIC DISCHARGES;

EID: 79955738201     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3573488     Document Type: Article

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