PIC-MC simulation of an RF capacitively coupled Ar/H2 discharge

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 202, Issue , 2003, Pages 300-304

  Neyts, E ^a   Yan, M ^a   Bogaerts, A ^a   Gijbels, R ^a  

^a UNIVERSITY OF ANTWERP   (Belgium)

Author keywords

Argon hydrogen RF discharge; Particle in cell Monte Carlo; Plasma simulation

Indexed keywords

CAPACITANCE; CARRIER CONCENTRATION; COMPUTER SIMULATION; HYDROGEN; PARTIAL PRESSURE; PLASMA SIMULATION;

CAPACITIVELY COUPLED DISCHARGES;

ARGON;

EID: 0037376732     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(02)01873-6     Document Type: Conference Paper

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