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Journal of Applied Physics

Volumn 107, Issue 8, 2010, Pages

Properties of inductively coupled rf Ar/ H2 plasmas: Experiment and global model

(2) Kimura, Takashi a Kasugai, Hiroki a

a NAGOYA INSTITUTE OF TECHNOLOGY (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON DENSITIES; ELECTRON ENERGY DISTRIBUTIONS; ELECTRON ENERGY PROBABILITY FUNCTIONS; GLOBAL MODELS; HIGH ENERGY; HIGH-ENERGY ELECTRON; HYDROGEN ATOMS; HYDROGEN DISCHARGE; INDUCTIVELY-COUPLED; ION CURRENTS; ION MASS; LOW ENERGIES; MAXWELLIAN DISTRIBUTION; MODEL RESULTS; MOLECULAR HYDROGEN; PLASMA PARAMETER; TOTAL PRESSURE; TWO-TEMPERATURE;

DISSOCIATION; ELECTRIC DISCHARGES; ELECTROMAGNETIC INDUCTION; ELECTRON ENERGY LEVELS; ELECTRON TEMPERATURE; EMISSION SPECTROSCOPY; EXPERIMENTS; OPTICAL EMISSION SPECTROSCOPY; PROBABILITY DISTRIBUTIONS; PROBES;

HYDROGEN;

EID: 77952417210 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.3345084 Document Type: Article

Times cited : (63)

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