Particle-in-cell simulation of hydrogen discharge driven by combined radio frequency and pulse sources

Physics of Plasmas

Volumn 17, Issue 10, 2010, Pages

  Sun, Jizhong ^a   Li, Xiantao ^a   Sang, Chaofeng ^a   Jiang, Wei ^a   Zhang, Pengyun ^a   Wang, Dezhen ^a  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITIVE DISCHARGES; ELECTRON ENERGIES; HYDROGEN DISCHARGE; HYDROGEN MOLECULE; LOW-PRESSURE HYDROGEN; MONTE CARLO COLLISION; OFF TIME; PARTICLE-IN-CELL; PARTICLE-IN-CELL SIMULATIONS; PHYSICAL MECHANISM; PRODUCTION RATES; PULSE SOURCES; PULSE VOLTAGE; RADIO FREQUENCIES; RF SOURCES; SHORT PULSE SOURCES; SIMULATION RESULT; VIBRATIONALLY EXCITED; WORK FOCUS;

DISSOCIATION; ELECTRONS; HYDROGEN; RADIO; RADIO WAVES;

ELECTRON ENERGY LEVELS;

EID: 78149232642     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3495982     Document Type: Article

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