Modelling of a low-pressure argon breakdown in combined fields

Plasma Sources Science and Technology

Volumn 15, Issue 1, 2006, Pages 1-7

  Radmilović Radjenović, Marija ^a   Radjenović, Branislav ^b  

^a UNIVERSITY OF BELGRADE   (Serbia)

^b UNIVERSITY OF BELGRADE   (Serbia)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTRIC BREAKDOWN; ELECTRODES; ELECTROMAGNETIC WAVE EMISSION; MONTE CARLO METHODS; NATURAL FREQUENCIES; PRESSURE EFFECTS;

DC ELECTRIC FIELD; ELECTRODE SEPARATION; RADIO-FREQUENCY;

ARGON;

EID: 32844466385     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/15/1/001     Document Type: Article

References (46)

1. Townsend J S 1925 Motion of Electrons in Gases (Oxford: Oxford University Press)
2. Druyvesteyn M J and Penning F M 1940 Rev. Mod. Phys. 12 87
3. Varnerin L J Jr and Brown S C 1950 Phys. Rev. 79 946
4. Raizer Yu P 1991 Gas Discharge Physics (Berlin: Springer)
5. Lisovskiy V A and Yegorenkov V D 1994 J. Phys. D: Appl. Phys. 27 2340
6. Lisovskiy V A 1998 Tech. Phys. Lett. 24 308
7. Ligenza J R 1965 J. Appl. Phys. 36 2703
8. Eckbreth A C and Davis J W 1972 Appl. Phys. Lett. 21 25
9. Brown C O and Davis J W 1972 Appl. Phys. Lett. 21 480
10. Flamm D L, Donnelley V M and Ibbotson D E 1983 J. Vac. Sci. Technol. B 1 23
11. Kobayashi K, Mutsukura N and Machi Y 1986 J. Appl. Phys. 59 910
12. Moreau W M 1988 Semiconductor Lithography: Principles, Practices and Materials (New York: Plenum)
13. Sato M and Shoji M 1997 Japan. J. Appl. Phys. 36 5729
14. Smith H B, Charles C and Boswell R W 2003 Phys. Plasmas 10 875
15. Radmilović-Radjenović M, Lee J K, Iza F and Park G Y 2005 J. Phys. D: Appl. Phys. 38 1
16. Radmilović-Radjenović M and Lee J K 2005 Phys. Plasmas 12 063501
17. Kropotov N Yu, Kachanov Yu A, Reuka A G, Lisovskiy V A, Erorenkov V D and Farenik V 1988 Sov. Tech. Phys. Lett. 14 159
18. Lisovskiy V A and Yegorenkov V D 1998 J. Phys. D: Appl. Phys. 31 3349
19. Kirchner F 1925 Ann. Phys. 77 287
20. Kirchner F 1925 Ann. Phys. 77 298
21. Varela A A 1947 Phys. Rev. 71 124
22. Prowse W A and Lane P E 1956 Proc. Phys. Soc. B 69 33
23. Gill E B W and von Engel A 1949 Proc. R. Soc. A 197 107
24. Harries W L and von Engel A 1954 Proc. R. Soc. A 222 490
25. Francis G 1955 Proc. Phys. Soc. B 68 137
26. Levitskii S M 1958 Sov. Phys. Tech. Phys. 2 887
27. Sen S N and Bhattacharjee B 1965 Can. J. Phys. 43 1543
28. Radmilović-Radjenović M, Petrović Z Lj and Lee J K 2005 ICPIG: 27th Proc. Int. Conf. on Phenomena in Ionized Gases (Eindhoven) pp 17-121
29. Stalder K R, Anderson C A, Mullanand A A and Grahun W G 1988 J. Phys. D: Appl. Phys. 21 411
30. Loureiro S P A and Ferreira C M 1992 J. Phys. D: Appl. Phys. 25 960
31. Kihara T 1952 Rev. Mod. Phys. 24 45
32. Radmilović M, Stojanović V and Petrović Z Lj 2000 SPIG: 20th Symp. on Physics of Ionized Gases (Zlatibor, Yugoslavia, 2000) (The Book of Contributed Paper) p 131
33. Radmilović-Radjenović M 2004 SPIG: 21st Symp. on Physics of Ionized Gases (Soko Banja, Serbia and Montenegro, 2002) (Invited Lectures, Topical Invited Lectures and Progress Reports) p 107
34. Birdsall C K 1991 IEEE Trans. Plasma Sci. 19 65
35. Verboncoeur J P, Alves M V, Vahedi V and Birdsall C K 1993 J. Comput. Phys. 104 321
36. Hamaguchi S 1999 IBM J. Res. Dev. B 43 199
37. Birdsall C K 1991 IEEE Trans. Plasma. Sci. 19 65
38. Vahedi V and Surendra M 1995 Comput. Phys. Commun. 87 179
39. Vaughan J R M 1989 IEEE Trans. Electron Devices 36 1963
40. Vaughan J R M 1993 IEEE Trans. Electron Devices 40 830
41. Phelps A V and Petrović Z Lj 1999 Plasma Sources Sci. Technol. 8 R21
42. Boeuf J P 1987 Phys. Rev. A 36 2782
43. Valfells A, Ang L K, Lau Y Y and Gilgenbach R M 2000 Phys. Plasmas 7 750
44. Phelps A V, Pitchford L C, Pedoussat C and Donko Z 1999 Plasma Sources Sci. Technol. 8 B1
45. Parker J H Jr and Lowke J J 1969 Phys. Rev. 181 290
46. Skullerud H R 1969 J. Phys. B: At. Mol. Phys. 2 86