The influence of electron reflection at the electrode and secondary electron emission on a strongly magnetized low-pressure RF discharge

Journal of Physics D: Applied Physics

Volumn 29, Issue 2, 1996, Pages 378-387

  Krimke, Ralf ^a   Urbassek, Herbert M ^a  

^a University of Koblenz Landau   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; COMPUTER SIMULATION; ELECTRODES; ELECTRON EMISSION; ELECTRON REFLECTION; ELECTRONS; IONS; MAGNETIC FIELDS; MONTE CARLO METHODS; PLASMA DENSITY; PLASMA SHEATHS; PLASMAS;

ELECTRODE SHEATH; ELECTRON GYRO-MOTION; KINETIC SIMULATION; LOW PRESSURE RADIO FREQUENCY DISCHARGE; NON-COLLIDING ELECTRONS; SECONDARY ELECTRON EMISSION;

ELECTRIC DISCHARGES;

EID: 0030082098     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/29/2/014     Document Type: Article

References (35)

1. Levitskii S M 1958 Sov. Phys.-Tech. Phys. 2 887
2. Godyak V A and Khanneh AA 1986 IEEE Trans. Plasma Sci. 14 112
3. Boeuf J P and Belenguer P 1990 Nonequilibrium Processes in Partially Ionized Gases ed M Capitelli and J N Bardsley (New York: Plenum) p 155
4. Raizer Y P 1991 Gas Discharge Physics (Berlin: Springer)
5. Raizer Y P and Schneider M N 1994 J. Phys. D: Appl. Phys. 27 1457.
6. Okazaki K, Makabe T and Yamaguchi Y 1989 Appl. Phys. Lett. 54 1742
7. Belenguer P and Boeuf JP 1990 Phys. Rev. A 41 4447
8. Young F and Wu C H 1993 J. Phys. D: Appl. Phys. 26 782
9. Carman R J 1992 J. Phys. D: Appl. Phys. 25 198
10. Makabe T, Nakano N and Yamaguchi Y 1992 Phys. Rev. A 45 2520
11. Lukyanova A V, Rakhimov A T and Suetin N V 1991 IEEE Trans. Plasma Sci. 19 197
12. Surenda M, Graves D B and Morey I J 1990 Appl. Phys. Lett. 56 1022
13. Sommerer T J, Hitchon WNH, Harvey R E P and Lawler JE 1991 Phys. Rev. A 43 4452
14. Misium G R, Lichtenberg A J and Lieberman M A 1989 J. Vac. Sci. Technol. A 7 1007
15. Tochikubo F et al 1990 J. Phys. D: Appl. Phys. 23 1184
16. Korzec D, Engemann J and Rapp J 1992 Rev. Sci. Instrum. 63 3068
17. Krimke R, Urbassek H M, Korzec D and Engemann J 1994 J. Phys. D: Appl. Phys. 27 1653
18. Dasgupta A and Bhatia A K 1985 Phys. Rev. A 32 3335
19. Wetzel R C, Baiocchi F A, Hayes T R and Freund R S 1987 Phys. Rev. A 35 559
20. Bretagne J, Callede M L G and Puech V 1986 J. Phys. D: Appl. Phys. 19 761
21. Cramer W H 1959 J. Chem. Phys. 30 641
22. Hofer W O 1987 J. Vac. Sci. Technol. A 5 2213
23. Chapman B 1980 Glow Discharge Processes (New York: Wiley)
24. Schou J 1988 Scanning Microsc. 2 607
25. Devooght J et al (eds) 1991 Particle Induced Electron Emission vol 1 (Berlin: Springer)
26. Niedrig H 1982 J. Appl. Phys. 53 R15
27. Oechsner H 1978 Phys. Rev. B 17 1052
28. Baragiola R A 1993 Nucl. Instrum. Methods B 78 223
29. Baragiola R A, Alonso E V, Perron J and Oliva-Florio A 1979 Surf. Sci. 90 240
30. Birdsall C K and Langdon A B 1985 Plasma Physics via Computer Simulation (New York: McGraw-Hill)
31. Verboncoeur J P, Vahedi V and Alves MP 1995 Technical Report 2, Software Distribution Office, ILP, EECS Department, University of California, Berkeley
32. Krimke R and Urbassek H M 1995 IEEE Trans. Plasma Sci. 23 103
33. Brackbill J U and Cohen BI 1985 Orbit Averaging and Subcycling in Particle Simulation of Plasmas (New York: Academic)
34. Krimke R and Urbassek HM 1995 Plasma Sources Sci. Technol. to be published
35. Korzec D 1993 Fonschrittsberichte VDI series 9, number 160 (Düsseldorf: VDI) (in German)