Fluid simulation of the phase-shift effect in hydrogen capacitively coupled plasmas: I. Transient behaviour of electrodynamics and power deposition

Journal of Physics D: Applied Physics

Volumn 45, Issue 1, 2012, Pages

  Zhang, Yu Ru ^a   Xu, Xiang ^a   Bogaerts, Annemie ^b   Wang, You Nian ^a  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

^b UNIVERSITY OF ANTWERP   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ABSOLUTE VALUES; BULK PLASMA; CAPACITIVELY COUPLED PLASMAS; ELECTRON FLUX; FLUID MODELS; FLUID SIMULATIONS; IN-PHASE; PHASE DIFFERENCE; PHASE SHIFT MODULATION; PLASMA CHARACTERISTICS; POWER DEPOSITION; SHEATH REGIONS; SPATIOTEMPORAL DISTRIBUTIONS; VERY HIGH FREQUENCY; DENSITY PROFILE; DEPOSITION PROCESS; EDGE EFFECT; HIGH DENSITY; ION FLUXES; NONUNIFORMITY; OFF-AXIS; PLASMA ETCH; POWER DENSITIES; POWER SOURCES; STANDING WAVE EFFECTS; TWO DIMENSIONAL FLUID MODEL;

COMPUTER SIMULATION; ELECTRIC DISCHARGES; ELECTRODYNAMICS; ELECTRONS; HYDROGEN; INDUCTIVELY COUPLED PLASMA; MAXWELL EQUATIONS; PHASE SHIFT; PLASMA DEPOSITION; PHASE SHIFTERS; PLASMA DENSITY;

ELECTROMAGNETISM; PLASMA DEPOSITION;

EID: 83655202734     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/45/1/015202     Document Type: Article

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