Chemical kinetics and energy transfer in moderate pressure H2 plasmas used in diamond MPACVD processes

Plasma Sources Science and Technology

Volumn 8, Issue 3, 1999, Pages 494-512

  Hassouni, K ^a   Gicquel, A ^a   Capitelli, M ^b   Loureiro, J ^b  

^a UNIVERSITÉ PARIS 13   (France)

^b NONE

Author keywords

[No Author keywords available]

Indexed keywords

GROUND STATE; HYDROGEN; IONIZATION; MATHEMATICAL MODELS; MOLECULAR VIBRATIONS; PLASMA FLOW; REACTION KINETICS; SEMICONDUCTING DIAMONDS;

BOLTZMANN EQUATION; EXCITED STATE; KINETIC MODEL; VIBRATIONAL KINETICS;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

EID: 0032643964     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/8/3/320     Document Type: Article

References (63)

1. Gicquel A, Anger E, Ravet M F, Fabre D, Scatena G and Wang Z Z 1993 Diam. Rel. Mater. 2 417-24
2. Scott C D, Farhat S, Gicquel A, Hassouni K and Lefebvre M 1996 J. Thermophys. Heat Trans. 10 426-35
3. Capitelli M, Colonna G, Hassouni K and Gicquel A 1996 Plasma Chem. Plasma Process 16 153-85
4. Loureiro J and Ferreira C M 1989 J. Phys. D: Appl. Phys. 22 1680-91
5. Cacciatore M, Capitelli M and Dilonardo M 1978 Chem. Phys. 34 193
6. Corse C, Capitelli M, Bacal M, Bretagne J and Lagana A 1987 Chem. Phys. 117 177-95
7. Gorse C, Celiberto R, Cacciatore M, Lagana A and Capitelli M 1992 Chem. Phys. 161 211-27
8. Hiskes J R 1991 J. Appl. Phys. 70 3409-17
9. Sawada K, Eriguchi K and Fujimoto T 1993 J. Appl. Phys. 73 8122-5
10. Sawada K and Fujimoto T 1995 J. Appl. Phys. 78 2913-24
11. Gicquel A, Hassouni K, Farhat S, Breton Y, Scott C D and Lefebvre M 1994 Diam. Rel. Mater. 3 581-6
12. Gicquel A, Hassouni K, Breton Y, Chenevier M and Cubertafon J C 1996 Diam. Rel. Mater. 5 366-72
13. Grotjohn T A, Vikharev A and Asmussen J to be published
14. Garscadden A and Nagpal R 1995 Plasma Sources Sci. Technol. 4 268-80
15. Matveyev A A and Silakov V P 1995 Plasma Sources Sci. Technol. 4 606-17
16. Tawara H, Itikawa Y, Nishimura H and Yoshino M 1990 J. Phys. Chem. Ref. Data 19 617-36
17. Bradsley J N and Wadehra J M 1979 Phys. Rev. A 20 1398-405
18. Celiberto R, Capitelli M and Lumanna U 1994 Chem. Phys. 183 101
19. Gicquel A, Chenevier M, Hassouni K, Tserepi A and Dubus M 1998 J. Appl. Phys. 83 7504-21
20. Preppernau B L, Pearce K, Tserepi A, Wurzberg E and Miller T A 1995 Chem. Phys. 196 371-81
21. Aubreton J 1985 Doctorat Es-Sciences de Physique Université de Limoges
22. Cacciatore M and Capitelli M 1974 Z. Naturf. a 29 1507-9
23. Sawada K and Fujimoto T 1994 Phys. Rev. E 49 5565-73
24. Shimamura I and Fujimoto T 1990 Phvs. Rev. A 42 2346-53
25. Kunc J A 1987 Phys. Fluids 30 2255-63
26. Vriens L and Smeets A H M 1980 Phys. Rev. A 22 940-51
27. Johnson L C 1972 Astrophys. J. 174 227-36
28. Janev R K, Langer W D, Evans J K and Prost D E 1987 Elementary Processes in Hydrogen-Helium Plasmas ed G Ecker, P Lambropoulos and H Wlather (Berlin: Springer)
29. Glass-Maujean M 1989 Phys. Rev. Lett. 62 144-6
30. Terazawa N, Ukai M, Kouchi N, Kameta K and Hatano Y 1993 J. Chem. Phys. 99 1637-43
31. Chupka W A, Russel M E and Refaey K 1968 J. Chem. Phys. 48 1518
32. Lewis J W L and Williams W D 1976 J. Quant. Spectrosc. Radiat. Transfer 16 939-46
33. Hiskes J 1996 Appl. Phys. Lett. 69 755
34. Miles W T, Thompson R and Green AES 1972 J. Appl. Phys. 43 678-86
35. Guyon P M, Breton J and Glass-Maujean M 1979 Chem. Phys. Lett. 68 314-19
36. Möhlmann G R and Heer F J D 1976 Chem. Phys. Lett. 43 240-4
37. Cacciatore M and Capitelli M 1981 Chem. Phys. 55 67-72
38. Celiberto R and Rescigno T N 1992 Phys. Rev. A 47 1939-45
39. Celiberto R, Lamanna U T and Capitelii M 1994 Phys. Rev. A 50 4778
40. Glass-Maujean M, Quadrelli P, Dressler K and Wolniewicz L 1983 Phys. Rev. A 28 2868-75
41. Glass-Maujean M, Quadrelli P and Dressler K 1984 At. Data Nucl. Data Tables 3 273-300
42. Guberman S L and Dalgarno A 1992 Phys. Rev. A 45 2784-9
43. Eyler E E and Pipkin F M 1981 Phys. Rev. Lett. 47 1270-2
44. Wedding A B and Phelps A V 1988 J. Chem. Phys. 89 2965-74
45. Tischer H and Phelps A V 1985 Chem. Phys. Lett. 117 550-4
46. Fink E H, Akins D L and Moore C B 1972 J. Chem. Phys. 56 900-15
47. Kligler D J, Bokor J and Rhodes C K 1980 Phys. Rev. A 21 607-17
48. Catherinot A, Dubreuil B and Gand M 1978 Phys. Rev. A 18 1097-102
49. Nicolaides C A, Theodorakopoulos G and Petsalakis I D 1983 J. Chem. Phys. 80 1705-6
50. Cacciatore M, Capitelli M and Gorse C 1980 J. Phys. D: Appl. Phys. 13 575-82
51. Eerden M J J, Sanden M C M v d, Otorbaev D K and Schram D C 1995 Phys. Rev. A 51 3362-5
52. Hirschfelder J O, Curtis C F and Bird R B 1954 The Molecular Theory of Cases and Liquids (New York: Wiley)
53. Krasnoperov L N, Kalinovski I J, Chu H N and Gutmann D 1993 J. Phys. Chem. 97 11 787-96
54. Ferreira C M 1992 Microwave Discharges: Fundamentals and Applications ed C M Ferreira and M Moisan (New York: Plenum) pp 313-38
55. Hassouni K, Farhat S and Scott C D 1997 Handbook of Industrial Diamond and Diamond Films ed M A Prelas, G Popovici and L K Bigelow (New York: Dekker) pp 653-72
56. Yos J M 1963 NASA Technical Memorandum TM-63-7, AVCO-RAD, Wilmington
57. Oskam H J 1958 Microwave Investigation of Desintegrating Caseous Discharge Plasmas (Eindhoven: Philips)
58. Gicquel A, Chenevier M, Breton Y, Petiau M, Booth J P and Hassouni K 1996 J. Physique. III 6 1167-80
59. Hassouni K, Farhat S, Scott C D and Gicquel A 1996 J. Physique III 6 1229-43
60. Hassouni K, Scott C S, Farhat S, Gicquel A and Capitelli M 1997 Surf. Coat. Technol. 97 391-403
61. Moisan M, Hubert J, Margot J, Sauvé G and Zarkrzewski Z 1993 Microwave Discharges: Fundamentals and Applications ed C M Ferreira and M Moisan (New York: Plenum) pp 1-24
62. Otorbaev D K, Sanden M C M v d and Schram D C 1995 Plasma Source Sci. Technol. 4 293-301
63. Varghese P L and Gonzales D A 1995 Molecular Physics and Hypersonic Flows ed M Capitelli (Dordrecht: Kluwer) pp 105-14