Comparison of measurements and particle-in-cell simulations of ion energy distribution functions in a capacitively coupled radio-frequency discharge

Physics of Plasmas

Volumn 14, Issue 10, 2007, Pages

  O'Connell, D ^a,b   Zorat, R ^a   Ellingboe, A R ^a   Turner, M M ^a  

^a DUBLIN CITY UNIVERSITY   (Ireland)

^b RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DATABASE SYSTEMS; DISTRIBUTION FUNCTIONS; PLASMA DENSITY; PLASMA THEORY;

HYDROGEN DISCHARGE; ION ENERGY ANALYSIS; RADIO-FREQUENCY PLASMA;

ELECTRIC DISCHARGES;

EID: 36048988493     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2795634     Document Type: Article

References (39)

1. M. A. Lieberman and A. J. Lichtenberg, Principles of Plasma Discharges and Materials Processing (Wiley, New York, 1994).
2. J. R. Roth, Industrial Plasma Engineering (Institute of Physics, Bristol, 1995).
3. T. Gans, J. Schulze, D. O'Connell, U. Czarnetzki, R. Faulkner, A. R. Ellingboe, and M. M. Turner, Appl. Phys. Lett. 89 261502 (2006).
4. J. Janes and C. Huth, J. Vac. Sci. Technol. A 10, 3522 (1992).
5. D. O'Connell, T. Gans, D. Vender, U. Czarnetzki, and R. Boswell, Phys. Plasmas 14, 034505 (2007).
6. R. T. C. Tsui, Phys. Rev. 168, 168 (1968).
7. Y. Wang and J. K. Olthoff, J. Appl. Phys. 85, 6358 (1999).
8. M. Zeuner, H. Neumann, and J. Meichsner, J. Appl. Phys. 81, 2985 (1997).
9. M. Zeuner, H. Neumann, and J. Meichsner, Vacuum 48, 433 (1997).
10. M. Zeuner, H. Neumann, and J. Meichsner, Jpn. J. Appl. Phys., Part 1 36, 4711 (1997).
11. D. Field, D. F. Klemperer, P. W. May, and Y. P. Song, J. Appl. Phys. 70, 82 (1991).
12. B. E. Thompson, K. D. Allen, A. D. Richards, and H. H. Sawin, J. Appl. Phys. 59, 1890 (1996).
13. W. Schwarzenbach, G. Cunge, and J. P. Booth, J. Appl. Phys. 85, 7562 (1999).
14. R. J. M. M. Snijkers, M. J. M. van Sambeek, M. B. Hoppenbrouwers, G. M. W. Kroessen, and F. J. de Hoog, J. Appl. Phys. 79, 8982 (1996).
15. S. A. Voronin, M. R. Alexander, and J. W. Bradley, Meas. Sci. Technol. 16, 2446 (2005).
16. S. K. Karkari, H. Backer, D. Forder, and J. W. Bradley, Meas. Sci. Technol. 13, 1431 (2002).
17. T. Gans, M. Osiac, D. O'Connell, V. A. Kadetov, U. Czarnetzki, T. Schwarz-Selinger, H. Halfmann, and P. Awakowicz, Plasma Phys. Controlled Fusion 47, A353 (2005).
18. M. Osiac, T. Schwarz-Selinger, D. O'Connell, B. Heil, Z. Lj. Petrovic, M. M. Turner, T. Gans, and U. Czarnetzki, Plasma Sources Sci. Technol. 16, 355 (2007).
19. R. Zorat, "Numerical modelling of low temperature radio-frequency hydrogen plasmas," Ph.D. thesis, Dublin City University (2003).
20. E. A. G. Hamers, W. G. J. H. M. van Sark, J. Bezemer, W. J. Goedheer, and van der Weg, Int. J. Mass Spectrom. Ion Process. 173, 91 (1998).
21. D. W. O. Heddle, Electrostatic Lens Systems (IOP, Bristol, 1991).
22. D. A. Dahl, J. E. Delmore, and A. D. Appelhans, Rev. Sci. Instrum. 61, 607 (1990).
23. K. Ellmer, R. Wendt, and K. Wiesemann, Int. J. Mass. Spectrom. 223, 679 (2003).
24. J. W. Coburn and E. Kay, J. Vac. Sci. Technol. 8, 738 (1971)
25. J. W. Coburn and E. Kay, J. Appl. Phys. 43, 4965 (1972).
26. J. Liu, G. L. Huppert, and H. H. Sawin, J. Appl. Phys. 68, 3916 (1990).
27. A. V. Phelps, J. Phys. Chem. Ref. Data 19, 653 (1990).
28. T. Simko, V. Martisovits, J. Bretagne, and G. Gousset, Phys. Rev. E 56, 5908 (1997).
29. R. T. Farouki, S. Hamaguchi, and M. Dalvie, Phys. Rev. A 45, 5913 (1992).
30. E. Kawamura, V. Vahedi, M. A. Lieberman, and C. K. Birdsall, Plasma Sources Sci. Technol. 8, R45 (1999).
31. P. Benoit-Cattin and L C. Bernard, J. Appl. Phys. 39, 5723 (1968).
32. C. Wild and P. Koidl, Appl. Phys. Lett. 54, 2909 (1989).
33. C. Wild and P. Koidl, J. Appl. Phys. 69, 2909 (1991).
34. N. Xiang and F. L. Waelbroeck, Phys. Plasmas 12, 033505 (2005).
35. N. Yu. Babaeva, J. K. Lee, J. W. Shon, and E. A. Hudson, J. Vac. Sci. Technol. A 23, 699 (2005).
36. D. Vender and R. W. Boswell, IEEE Trans. Plasma Sci. 18 725, 1990.
37. T. Gans, V. Schulz-von der Gathen, U. Czarnetzki, and H. F. Doebele, Contrib. Plasma Phys. 42, 596 (2002).
38. T. Babkina, T. Gans, and U. Czarnetzki, Europhys. Lett. 72, 235 (2005).
39. T. Gans, V. Schulz-von der Gathen, and H. F. Doebele, Europhys. Lett. 66, 232 (2004).