A self-consistent fluid model for radio-frequency discharges in SiH4-H2 compared to experiments

Journal of Applied Physics

Volumn 82, Issue 5, 1997, Pages 2060-2071

  Nienhuis, G J ^a   Goedheer, W J ^a   Hamers, E A G ^b   Van Sark, W G J H M ^b,c   Bezemer, J ^b  

^a FOM INSTITUTE FOR PLASMA PHYSICS RIJNHUIZEN   (Netherlands)

^b UTRECHT UNIVERSITY   (Netherlands)

^c RADBOUD UNIVERSITY NIJMEGEN   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000676645     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.366016     Document Type: Article

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