Modified Reynolds' equation and analytical analysis of squeeze-film air damping of perforated structures

Journal of Micromechanics and Microengineering

Volumn 13, Issue 6, 2003, Pages 795-800

  Bao, Minhang ^a   Yang, Heng ^b   Sun, Yuancheng ^a   French, Paddy J ^b  

^a FUDAN UNIVERSITY   (China)

^b DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DAMPING; FINITE ELEMENT METHOD; REYNOLDS NUMBER;

PERFORATED PLATES;

MICROELECTROMECHANICAL DEVICES;

EID: 0242468690     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/13/6/301     Document Type: Article

References (11)

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3. Bao M 2000 Micro Mechanical Transducers - Pressure Sensors, Accelerometers, and Gyroscopes 1st edn (Amsterdam: Elsevier) section 3.2.5
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