Damping models for microcantilevers, bridges, and torsional resonators in the free-molecular-flow regime

Journal of Microelectromechanical Systems

Volumn 17, Issue 2, 2008, Pages 503-511

  Martin, Michael James ^a   Houston, Brian H ^a   Baldwin, Jeffrey W ^a   Zalalutdinov, Maxim K ^b  

^a NAVAL RESEARCH LABORATORY   (United States)

^b SFA INC   (United States)

Author keywords

Atomic force microscopy; Free molecular flow; Microbridge sensors; Microcantilever sensors; Microresonators; Q factor; Torsional resonators

Indexed keywords

FREE-MOLECULAR FLOW; MICROBRIDGE SENSORS; MICROCANTILEVER SENSORS; MICRORESONATORS; Q FACTOR; TORSIONAL RESONATORS;

ASPECT RATIO; ATOMIC FORCE MICROSCOPY; CHEMICAL SENSORS; COMPOSITE MICROMECHANICS; DAMPING; FLOW OF WATER; GASES; PHOTORESISTS; Q FACTOR MEASUREMENT; RESONATORS; VELOCITY;

MEMS;

EID: 55349086204     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2008.916321     Document Type: Article

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