Methyl monolayers suppress mechanical energy dissipation in micromechanical silicon resonators

Applied Physics Letters

Volumn 85, Issue 23, 2004, Pages 5736-5738

  Wang, Yu ^a   Henry, Joshua A ^a   Sengupta, Debodhonyaa ^a   Hines, Melissa A ^a  

^a Department of Molecular Biology and Genetics   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIOLOGICAL SENSING; MECHANICAL ENERGY DISSIPATION; MICROMECHANICAL SILICON RESONATORS; VISCOUS DRAG;

COMPOSITE MICROMECHANICS; DEFECTS; ENERGY DISSIPATION; MONOLAYERS; RESONATORS; SILICON;

ENERGY DISSIPATORS;

EID: 12844273739     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1832735     Document Type: Article

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