Support loss in the radial bulk-mode vibrations of center-supported micromechanical disk resonators

Sensors and Actuators, A: Physical

Volumn 134, Issue 2, 2007, Pages 582-593

  Hao, Zhili ^a   Ayazi, Farrokh ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Disk resonators; Elastic waves; Quality factor (Q); Radial bulk mode; Semi infinite medium; Support loss

Indexed keywords

BEAMS AND GIRDERS; BENDING STRENGTH; COMPOSITE MICROMECHANICS; COMPUTATIONAL GEOMETRY; TORSIONAL STRESS;

DISK RESONATORS; QUALITY FACTOR (Q); RADIAL BULK-MODE; SEMI-INFINITE MEDIUM; SUPPORT LOSS;

RESONATORS;

EID: 33847350160     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.05.020     Document Type: Article

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