An analytical model for support loss in micromachined beam resonators with in-plane flexural vibrations

Sensors and Actuators, A: Physical

Volumn 109, Issue 1-2, 2003, Pages 156-164

  Hao, Zhili ^a   Erbil, Ahmet ^b   Ayazi, Farrokh ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Beam resonator; Elastic wave; Flexural vibration; Micromachining; Quality factor; Support loss

Indexed keywords

ELASTIC WAVES; ELECTRIC EXCITATION; ENERGY DISSIPATION; FOURIER TRANSFORMS; MICROMACHINING; PERTURBATION TECHNIQUES; SHEAR STRESS; VIBRATIONS (MECHANICAL); WAVE PROPAGATION;

BEAM RESONATOR; FLEXURAL VIBRATION; QUALITY FACTOR;

OPTICAL RESONATORS;

EID: 0942267227     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2003.09.037     Document Type: Article

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