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Volumn , Issue , 2007, Pages 211-214

Non-isothermal micromechanical resonators

Author keywords

[No Author keywords available]

Indexed keywords

ISOTHERMS; MICROELECTROMECHANICAL DEVICES;

EID: 52249111583     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/memsys.2007.4433138     Document Type: Conference Paper
Times cited : (5)

References (9)
  • 1
  • 2
    • 27544502990 scopus 로고    scopus 로고
    • C. T.-C. Nguyen, Vibrating RF MEMS technology: fuel for an integrated micromechanical circuit revolution, presented at Transducers, 2005.
    • C. T.-C. Nguyen, "Vibrating RF MEMS technology: fuel for an integrated micromechanical circuit revolution", presented at Transducers, 2005.
  • 3
    • 85034569177 scopus 로고    scopus 로고
    • Temperature Compensation of a MEMS Resonator using Quality Factor as a Thermometer
    • presented at
    • M. A. Hopcroft, "Temperature Compensation of a MEMS Resonator using Quality Factor as a Thermometer", presented at MEMS 2006.
    • (2006) MEMS
    • Hopcroft, M.A.1
  • 4
    • 52249089110 scopus 로고    scopus 로고
    • Temperature Dependence of Quality Factor in MEMS Resonators
    • presented at
    • B. Kim et. al., "Temperature Dependence of Quality Factor in MEMS Resonators", presented at MEMS 2006.
    • (2006) MEMS
    • Kim, B.1    et., al.2
  • 5
    • 33845545957 scopus 로고    scopus 로고
    • Long - Term and Accelerated Life Testing of a Novel Single-Wafer Vacuum Encapsulation of MEMS Resonators
    • R. N. Candler et. al., "Long - Term and Accelerated Life Testing of a Novel Single-Wafer Vacuum Encapsulation of MEMS Resonators", IEEE Journal of Microelectromechanical Systems, 2006.
    • (2006) IEEE Journal of Microelectromechanical Systems
    • Candler, R.N.1    et., al.2
  • 8
    • 0042584650 scopus 로고
    • Internal Friction in Solids
    • C. Zener, "Internal Friction in Solids", Physical Review, 1937.
    • (1937) Physical Review
    • Zener, C.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.