Non-isothermal micromechanical resonators

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2007, Pages 211-214

  Chandorkar, S A ^a   Mehta, H ^a   Agarwal, M ^a   Hopcroft, M A ^a   Jha, C M ^a   Candler, R N ^b   Yama, G ^b   Bahl, G ^a   Kim, B ^a   Melamud, R ^a   Goodson, K E ^a   Kenny, T W ^a  

^a Stanford University   (United States)

^b BOSCH RESEARCH AND TECHNOLOGY CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ISOTHERMS; MICROELECTROMECHANICAL DEVICES;

DOUBLE-ENDED-TUNING-FORK RESONATORS; LINEAR TEMPERATURE GRADIENTS; MARGINAL EFFECTS; MEMS RESONATORS; NONISOTHERMAL; QUALITY FACTORS; REFERENCE OSCILLATORS; VARYING TEMPERATURE;

MICROMECHANICAL RESONATORS;

EID: 52249111583     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/memsys.2007.4433138     Document Type: Conference Paper

References (9)

1. C. T. C. Nguyen, "MEMS for Frequency Control and Timing", presented at IEEE FCS, 2005.
2. C. T.-C. Nguyen, "Vibrating RF MEMS technology: fuel for an integrated micromechanical circuit revolution", presented at Transducers, 2005.
3. M. A. Hopcroft, "Temperature Compensation of a MEMS Resonator using Quality Factor as a Thermometer", presented at MEMS 2006.
4. B. Kim et. al., "Temperature Dependence of Quality Factor in MEMS Resonators", presented at MEMS 2006.
5. R. N. Candler et. al., "Long - Term and Accelerated Life Testing of a Novel Single-Wafer Vacuum Encapsulation of MEMS Resonators", IEEE Journal of Microelectromechanical Systems, 2006.
6. M. J. Madou, "Fundamentals of Microfabrication", CRC press, 2002.
7. L. Meirovitch, "Elements of Vibration Analysis", McGrawHill, 1986.
8. C. Zener, "Internal Friction in Solids", Physical Review, 1937.
9. A. Duwel et. al., "Engineering MEMS Resonators with LOW Thermoelastic Damping", IEEE Journal of Microelectromechanical Systems, 2006.