Frequency trimming and Q-factor enhancement of micromechanical resonators via localized filament annealing

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 1, Issue , 1997, Pages 109-112

  Wang, Kun ^a   Wong, Ark Chew ^a   Hsu, Wan Thai ^a   Nguyen, Clark T C ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; MICROELECTROMECHANICAL DEVICES; Q FACTOR MEASUREMENT;

FREQUENCY TRIMMING; LOCALIZED FILAMENT ANNEALING;

RESONATORS;

EID: 0030653156     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)