Macromodel extraction of gas damping effects for perforated surfaces with arbitrarily-shaped geometries

2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002

Volumn , Issue , 2002, Pages 178-181

  Yang, Yao Joe ^a   Yu, Cheh Jia ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

Damping; Model order reduction; Perforation; Perforation flow impedance; Squeeze film damping

Indexed keywords

ALGORITHMS; COMPUTER SIMULATION; FINITE ELEMENT METHOD; INTERCONNECTION NETWORKS; MICROELECTROMECHANICAL DEVICES; OSCILLATIONS; REYNOLDS NUMBER; SYSTEMS ANALYSIS;

FREQUENCY RANGE; MODEL ORDER REDUCTION; PERFORATION FLOW IMPEDANCE; SQUEEZE FILM DAMPING;

DAMPING;

EID: 4344655834     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)

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