Quality factors of MEMS gyros and the role of thermoelastic damping

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2002, Pages 214-219

  Duwel, Amy ^a,b   Weinstein, Marcie ^a,b   Gorman, John ^a,b   Borenstein, Jeff ^a,b   Ward, Paul ^a,b  

^a CHARLES STARK DRAPER LABORATORY   (United States)

^b MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DAMPING; GYROSCOPES; SILICON ALLOYS; THERMAL CONDUCTIVITY OF SOLIDS; THERMOELASTICITY; TRANSFER FUNCTIONS;

QUALITY FACTORS; SILICON-GERMANIUM ALLOYS; THERMOELASTIC DAMPING;

MICROELECTROMECHANICAL DEVICES;

EID: 0036118185     PISSN: 10846999     EISSN: None     Source Type: Journal    
DOI: 10.1109/MEMSYS.2002.984242     Document Type: Article

References (22)

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