High-fidelity modeling of MEMS resonators - Part II: Coupled beam-substrate dynamics and validation

Journal of Microelectromechanical Systems

Volumn 13, Issue 2, 2004, Pages 248-257

  Park, Yong Hwa ^a   Park, K C ^b  

^a SAMSUNG Electronics   (South Korea)

^b UCB 450   (United States)

Author keywords

Anchor loss; Coupled analysis; Mechanical filter; MEMS resonator; Q factor; Structural vibration

Indexed keywords

COMPUTATIONAL METHODS; DYNAMICS; INTERFACES (MATERIALS); MATHEMATICAL MODELS; NATURAL FREQUENCIES; Q FACTOR MEASUREMENT; RESONATORS; VIBRATIONS (MECHANICAL);

COUPLED ANALYSIS; DESIGN SENSITIVITY; HIGH FIDELITY MODELING; MECHANICAL FILTER;

MICROELECTROMECHANICAL DEVICES;

EID: 1942436710     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2004.825298     Document Type: Article

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