On the squeeze-film damping of micro-resonators in the free-molecule regime

Journal of Micromechanics and Microengineering

Volumn 14, Issue 12, 2004, Pages 1726-1733

  Hutcherson, Same ^a   Ye, Wenjing ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; BOUNDARY CONDITIONS; COMPUTER SIMULATION; DAMPING; MATHEMATICAL MODELS; MICROMACHINING; SENSORS;

CONTINUUM THEORY; MICROBEAMS; RESONATOR DEVICES; VISCOUS AIR DAMPING;

RESONATORS;

EID: 10844268965     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/12/018     Document Type: Article

References (27)

1. Melvas P, Kalvesten E and Stemme G 2001 A surface-micromachined resonant-beam pressure-sensing structure J. Micromech. Syst. 10 498-502
2. Wang L-P, Wolf R Jr, Wang Y, Deng K K, Zhou L, Davis R J and Trolier-McKinstry S 2003 Design, fabrication, and measurement of high-sensitivity piezoelectric microelectromechanical systems accelerometers J. Micromech. Microeng. 12 433-9
3. Zhou J, Li P, Zhang S, Zhou F, Huang Y, Yang P and Bao M 2002 A novel MEMS gas sensor with effective combination of high sensitivity and high selectivity Proc. 13th IEEE Int. Symp. on Applications of Ferroelectrics, ISAF 2002 pp471-4
4. Nguyen C 2003 MEMS technologies for communications Technical Proc. 2003 Nanotechnology Conf. and Trade Show vol 2 pp 404-7
5. Zook J D, Burns D W, Guckel H, Sniegowski J J, Engelstad R L and Feng Z 1992 Characteristics of polysilicon resonant microbeams Sensors Actuators A 3551-9
6. Cho Y H, Pisano A P and Howe R T 1994 Viscous damping model for laterally oscillating microstructures J. Microelectromech. Syst. 381-7
7. Mihailovich R E and MacDonald N C 1995 Dissipation measurements of vacuum-operated single-crystal silicon microresonators Sensors Actuators A 50 199-207
8. Lifshitz R and Roukes M L 2000 Thermoelastic damping in micro- and nanomechanical systems Phys. Rev. B 61 5600-9
9. Yasumura K Y, Stowe T D, Chow E M, Pfafman T, Kenny T W, Stipe B C and Rugar D 2000 Quality factors in micron- and submicron-thick cantilevers J. Microelectromech. Syst. 9 117-25
10. Pourkamali S, Hashimura A, Abdolvand R, Ho G K, Erbil A and Ayazi F 2003 High-Q single crystal silicon HARPASS capacitive beam resonators with self-aligned sub-100-nm transduction gaps J. Microelectromech. Syst. 12 487-96
11. Ye W, Wang X, Hemmert W, Freeman D and White J 2003 Air damping in lateral oscillating micro resonators: a numerical and experimental study J. Microelectromech. Syst. 12 557-66
12. Hosaka H, Itao K and Kuroda S 1995 Damping characteristics of beam-shaped micro-oscillators Sensors Actuators A 49 87-95
13. Veijola T and Turowski M 2001 Compact damping models for laterally moving microstructures with gas-rarefaction effects J. Microelectromech. Syst. 10 263-73
14. Gad-el-Hak M 1999 The fluid mechanics of microdevices-the Freeman scholar lecture J. Fluids Eng. ASME 121 5-33
15. Schaaf S A and Chambre P L 1961 Flow of Rarefied Gases (Princeton, NJ: Princeton University Press)
16. Sharipov F, Marques W and Kremer G M 2002 Free molecular sound propagation J. Accoust. Soc. Am. 112 395-401
17. Hadjiconstantinou N G and Simek O 2003 Sound propagation at small scales under continuum and non-continuum transport J. Fluid Mech. 488 399-408
18. Park J H, Back S W, Rang S J and Yu M J 2002 Analysis of thermal slip in oscillating rarefied flow using DSMC Numer. Heat Transfer A 42 647-59
19. Park J H, Bahukudumbi P and Beskok A 2004 Rarefaction effects on shear driven oscillatory gas flows: a direct simulation Monte Carlo study in the entire Knudsen regime 2004 Phys. Fluids 16 317-30
20. Christian R G 1966 The theory of oscillating-vane vacuum gauges Vacuum 16 175-8
21. Halliday D, Resnick R and Walker J 1997 Fundamentals of Physics Extended 5th edn (New York: Wiley) pp 484-501
22. Kadar Z, Kindt W, Bossche A and Mollinger J 1996 Quality factor of torsional resonators in the low-pressure region Sensors Actuators A 53 299-303
23. Li B, Wu H, Zhu C and Liu J 1999 The theoretical analysis on damping characteristics of resonant microbeam in vacuum Sensors Actuators A 77 191-4
24. Bao M, Yang H, Yin H and Sun Y 2002 Energy transfei model for squeeze-film air damping in low vacuum J. Micromech. Microeng. 12 341-6
25. Newell W E 1968 Miniaturization of tuning forks Science 161 1320-6
26. Goodman F O and Wachman H Y 1976 Dynamics of Gas-Surface Scattering (New York: Academic) pp 19-23
27. Breuer K S 2002 Lubrication in MEMS The MEMS Handbook ed M Gad-el-Hak (Washington, DC: CRC Press) pp 1-27