High-fidelity modeling of MEMS resonators - Part I: Anchor loss mechanisms through substrate

Journal of Microelectromechanical Systems

Volumn 13, Issue 2, 2004, Pages 238-247

  Park, Yong Hwa ^a   Park, K C ^b  

^a SAMSUNG Electronics   (South Korea)

^b UCB 450   (United States)

Author keywords

Damping; Energy loss; MEMS resonator; Q factor; Structural vibration; Wave propagation

Indexed keywords

COMPUTATIONAL METHODS; DAMPING; ENERGY DISSIPATION; FOURIER TRANSFORMS; MATHEMATICAL MODELS; RESONATORS; VIBRATIONS (MECHANICAL); WAVE TRANSMISSION;

PERIODIC EXCITATIONS; RESONATOR CENTER FREQUENCY; VIBRATING BEAMS;

MICROELECTROMECHANICAL DEVICES;

EID: 1942468583     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2004.825300     Document Type: Article

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