Intrinsic dissipation in high-frequency micromechanical resonators

Physical Review B - Condensed Matter and Materials Physics

Volumn 66, Issue 8, 2002, Pages 854161-8541615

  Mohanty, P ^a,b   Harrington, D A ^a   Ekinci, K L ^a   Yang, Y T ^a   Murphy, M J ^a   Roukes, M L ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

^b Boston University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

GALLIUM ARSENIDE; SILICON;

ACOUSTICS; ANISOTROPY; ARTICLE; MAGNETIC FIELD; MECHANICS; TEMPERATURE DEPENDENCE; THERMODYNAMICS;

EID: 0037104208     PISSN: 01631829     EISSN: None     Source Type: Journal    
DOI: 10.1103/PhysRevB.66.085416     Document Type: Article

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