Validating fast simulation of air damping in micromachined devices

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2002, Pages 210-213

  Wang, Xin ^a   Judy, Mike ^b   White, Jacob ^a  

^a USA   (United States)

^b ANALOG DEVICES INC   (United States)

Author keywords

BEM; Fluid; MEMS; Simulation; Stokes flow

Indexed keywords

ACCELEROMETERS; AIR; BOUNDARY ELEMENT METHOD; COMPUTER SIMULATION; DAMPING; FAST FOURIER TRANSFORMS; FINITE DIFFERENCE METHOD; FINITE ELEMENT METHOD; MICROMACHINING; MIRRORS; NAVIER STOKES EQUATIONS;

AIR DAMPING; MICRO-MIRROR; SOFTWARE PACKAGE FASTSTOKES; STOKES FLOW;

MICROELECTROMECHANICAL DEVICES;

EID: 0036123040     PISSN: 10846999     EISSN: None     Source Type: Journal    
DOI: 10.1109/MEMSYS.2002.984241     Document Type: Article

References (7)

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6. Efficiency and accuracy improvements for FastStokes, a precorrected-FFT accelerated 3-D stokes solver
7. Fast fluid analysis for multibody micromachined devices