Engineering MEMS resonators with low thermoelastic damping

Journal of Microelectromechanical Systems

Volumn 15, Issue 6, 2006, Pages 1437-1445

  Duwel, Amy ^a   Candler, Rob N ^b   Kenny, Thomas W ^b   Varghese, Mathew ^a  

^a CHARLES STARK DRAPER LABORATORY   (United States)

^b Stanford University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DAMPING; EIGENVALUES AND EIGENFUNCTIONS; FINITE ELEMENT METHOD; MICROELECTROMECHANICAL DEVICES; THERMOELASTICITY;

MICROMECHANICAL RESONATORS; THERMOELASTIC DAMPING;

RESONATORS;

EID: 33845525994     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.883573     Document Type: Article

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