Internal dielectric transduction of a 4.5 GHz silicon bar resonator

Technical Digest - International Electron Devices Meeting, IEDM

Volumn , Issue , 2007, Pages 415-418

  Weinstein, Dana ^a   Bhave, Sunil A ^a  

^a Department of Obstetrics Gynecology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON DEVICES; NONMETALS; SILICON;

EXPERIMENTAL VERIFICATION; FREQUENCY SCALING; SILICON BAR;

RESONATORS;

EID: 50249118543     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IEDM.2007.4418961     Document Type: Conference Paper

References (5)

1. D. Weinstein and S.A. Bhave, "Internal dielectric transduction: optimal position and frequency scaling," IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control (in press).
2. Y.-W. Lin, S.-S. Li, Y. Xie, Z. Ren, C.T.-C. Nguyen, "Vibrating Micromechanical Resonators with Solid Dielectric Capacitive Transducer Gaps," IEEE International Frequency Control Symposium 2005, pp.128-134.
3. V. Kaajakari, A.T. Alastalo, T. Mattila, "Electrostatic Transducers for Micromechanical Resonators: Free Space and Solid Dielectric", IEEE Transactions on UFFC 53 (12), pp. 2484-89 (2006).
4. A.-C. Wong, H. Ding, C.T.-C. Nguyen, "Micromechanical Mixer+ Filters," IEEE International Electron Device Meeting 1998, pp. 471-474.
5. Agilent Technologies - Frequency Converter Application http://na.tm.agilent.com/pna/help/PNAWebHelp/FreqOffset/FCA.htm cited: September 10, 2007.