Error sources in in-plane silicon tuning-fork MEMS gyroscopes

Journal of Microelectromechanical Systems

Volumn 15, Issue 3, 2006, Pages 479-491

  Weinberg, Marc S ^a   Kourepenis, Anthony ^a  

^a CHARLES STARK DRAPER LABORATORY   (United States)

Author keywords

Angular rate sensors; Gyroscope; Inertial sensor; Microelectromechanical systems (MEMS); Tuning fork gyroscope

Indexed keywords

CRYSTALLINE MATERIALS; ERROR ANALYSIS; GYROSCOPES; SILICON; SUBSTRATES;

ANGULAR RATE SENSORS; GLASS SUBSTRATE; INERTIAL SENSOR; TUNING-FORK GYROSCOPE;

MICROELECTROMECHANICAL DEVICES;

EID: 33745181657     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.876779     Document Type: Article

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