Experimental measurement and model analysis of damping effect in nanoscale mechanical beam resonators in air

Journal of Applied Physics

Volumn 96, Issue 7, 2004, Pages 3933-3938

  Yum, Kyungsuk ^a   Wang, Zhaoyu ^a   Suryavanshi, Abhijit P ^a   Yu, Min Feng ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DAMPING EFFECTS; MECHANICAL BEAM RESONATORS; NANOWIRES; REOLOGY;

AIR; ATOMIC FORCE MICROSCOPY; DAMPING; ELECTRIC FIELD EFFECTS; MATHEMATICAL MODELS; NANOSTRUCTURED MATERIALS; NANOTECHNOLOGY; OSCILLATIONS; RESONANCE; REYNOLDS NUMBER; VACUUM; VISCOSITY;

RESONATORS;

EID: 7044274796     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1787912     Document Type: Article

References (31)

1. P. Poncharal, Z. L. Wang, D. Ugarte, and W. A. de Heer, Science 283, 1513 (1999).
2. M.-F. Yu, G. J. Wagner, R. S. Ruoff, and M. J. Dyer, Phys. Rev. B 66, 073406 (2002).
3. A. P. Suryavanshi, M.-F. Yu, J. Wen, C. Tang, and Y. Bando, Appl. Phys. Lett. 84, 2527 (2004).
4. F. M. Battiston, J.-P. Ramseyer, H. P. Lang, M. K. Baller, Ch. Gerber, J. K. Gimzewski, E. Meyer, and H.-J. Güntherodt, Sens, Actuators B 77, 122 (2001).
5. N. Abedinov et al., J. Vac. Sci. Technol. B 21, 2931 (2003).
6. W. Liu, V. Montana, E. R. Chapman, U. Mohideen, and V. Parpura, Proc. Natl. Acad. Sci. U.S.A. 100, 13621 (2003).
7. B. Ilic, D. Czaplewski, H. G. Craighead, P. Neuzil, C. Campagnolo, and C. Batt, Appl. Phys. Lett. 77, 450 (2000).
8. B. Ilic, D. Czaplewski, M. Zalalutdinov, H. G. Craighead, P. Neuzil, C. Campagnolo, and C. Batt, J. Vac. Sci. Technol. B 19, 2825 (2001).
9. T. Ono and M. Esashi, Rev. Sci. Instrum. 74, 5141 (2003).
10. A. Gupta, D. Akin, and R. Bashir, Appl. Phys. Lett. 84, 1976 (2004).
11. C. Bergaud and L. Nicu, Rev. Sci. Instrum. 71, 2487 (2000).
12. S. Boskovic, J. W. M. Chon, P. Mulvaney, and J. E. Sader, J. Rheol. 46, 891 (2002).
13. X. Bai, E. G. Wang, P. Gao, and Z. L. Wang, Nano Lett. 3, 1147 (2003).
14. J. E. Sader, J. Appl. Phys. 84, 64 (1998).
15. G. Y. Chen, R. J. Warmack, T. Thundat, and D. P. Allison, Rev. Sci. Instram. 65, 2532 (1994).
16. D. A. Walters, J. P. Cleveland, N. H. Thomson, P. K. Hansma, M. A. Wendman, G. Gurley, and V. Elings, Rev. Sci. Instrum. 67, 3583 (1996).
17. M. V. Salapaka, H. S. Bergh, J. Lai, A. Majumdar, and E. McFarland, J. Appl. Phys. 81, 2480 (1997).
18. G. Lévêque, P. Girard, S. Belaidi, and G. Cohen Solal, Rev. Sci. Instrum. 68, 4137 (1997).
19. J. W. M. Chon, P. Mulvaney, and J. E. Sader, J. Appl. Phys. 87, 3978 (2000).
20. C.-M. Ho and Y.-C. Tai, Annu. Rev. Fluid Mech. 30, 579 (1998).
21. L. Sekaric, M. Zalalutdinov, R. B. Bhiladvala, A. T. Zehnder, J. M. Parpia, and H. G. Craighead, Appl. Phys. Lett. 81, 2641 (2002).
22. R. B. Bhiladvala and Z. J. Wang, Phys. Rev. E 69, 036307 (2004).
23. W. Weaver, S. P. Timoshenko, and D. H. Young, Vibration Problems in Engineering (John Wiley & Sons, New York, 1990).
24. L. Rosenhead, Laminar Boundary Layers (Clarendon, Oxford, 1963).
25. F. M. White, Viscous Fluid Flow (McGraw-Hill, New York, 1991).
26. C. Zhang, G. Xu, and Q. Jiang, Math. Mech. Solids 8, 315 (2003).
27. Z. W. Pan, Z. R. Dai, and Z. L. Wang, Science 291, 1947 (2001).
28. U. Dürig, H. R. Steinauer, and N. Blanc, J. Appl. Phys. 82, 3641 (1997).
29. T. Sulchek et al., Appl. Phys. Lett. 76, 1473 (2000).
30. J. Tamayo, A. D. L. Humphris, and M. J. Miles, Appl. Phys. Lett. 77, 582 (2000).
31. T. R. Rodríguez and R. García, Appl. Phys. Lett 82, 4821 (2003).