Analysis of thermoelastic damping in laminated composite micromechanical beam resonators

Journal of Micromechanics and Microengineering

Volumn 15, Issue 12, 2005, Pages 2398-2404

  Vengallatore, Srikar ^a  

^a MCGILL UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC MATERIALS; LAMINATED COMPOSITES; METALLIZING; MICROMACHINING; NATURAL FREQUENCIES; RESONATORS; SILICON CARBIDE; THERMOELASTICITY; VOLUME FRACTION;

CERAMIC BEAMS; MATERIAL PROPERTIES; MULTIFUNCTIONAL COMPOSITES; THERMOELASTIC DAMPING;

DAMPING;

EID: 27944498933     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/15/12/023     Document Type: Article

References (34)

1. Senturia S D 2001 Microsystem Design (Norwell: Kluwer)
2. Wang K, Wong A-C and Nguyen C T-C 2000 VHF free-free beam high-Q micromechanical resonators J. Microelectromech. Syst. 9 347-60
3. Gabrielson T B 1993 Mechanical-thermal noise in micromachined acoustic and vibration sensors IEEE Trans. Electron Devices 40 903-9
4. Mamin H J and Rugar D 2001 Sub-attonewton force detection at millikelvin temperatures Appl. Phys. Lett. 79 3358-60
5. Yasumura K Y, Stowe T D, Chow E M, Pfafman T, Kenny T W, Stipe B C and Rugar D 2000 Quality factors in micron- and submicron-thick cantilevers J. Microelectromech. Syst. 9 117-25
6. Srikar V T and Spearing S M 2003 Materials selection in micromechanical design: an application of the Ashby approach J. Microelectromech. Syst. 12 3-10
7. Nowick A S and Berry B S 1972 Anelastic Relaxation in Crystalline Solids (New York: Academic)
8. Choi D H, Kim H and Nix W 2004 Anelasticity and damping of thin aluminum films on silicon substrates J. Microelectromech. Syst. 13 230-7
9. Vengallatore S 2005 Gorsky damping in nanomechanical structures Scripta Materialia 52 1256-68
10. Zener C 1937 Internal friction in solids-I. Theory of internal friction in reeds Phys. Rev. 52 230-5
11. Zener C 1938 Internal friction in solids-II. General theory of thermoelastic internal friction Phys. Rev. 53 90-9
12. Lifshitz R and Roukes M L 2000 Thermoelastic damping in micro- and nanomechanical systems Phys. Rev. B 61 5600-9
13. Kinra V K and Milligan K B 1994 A second-law analysis of thermoelastic damping J. Appl. Mech. 61 71-6
14. Roszhart T V 1990 The effect of thermoelastic internal friction on the Q of micromachined silicon resonators Proc. IEEE Tech. Dig. Solid-State Sensor Actuator Workshop (Hilton Head, SC) pp 13-6
15. Pourkamali S, Hashimura A, Abdolvand R, Ho G K, Erbil A and Ayazi F 2003 High-Q single crystal silicon HARPSS capacitive beam resonators with self-aligned sub-100 nm transduction gaps J. Microelectromech. Syst. 12 487-96
16. Photiadis D M, Houston B H, Liu X, Bucaro J A and Marcus M H 2002 Thermoelastic loss observed in a high Q mechanical oscillator Physica B 316 408-10
17. Gysin U, Rast S, Ruff P, Meyer E, Lee D W, Vettiger P and Gerber C 2004 Temperature dependence of the force sensitivity of silicon cantilevers Phys. Rev. B 69 045403
18. Duwel A, Gorman J, Weinstein M, Borenstein J and Ward P 2003 Experimental study of thermoelastic damping in MEMS gyros Sensors Actuators A 103 70-5
19. Srikar V T and Senturia S D 2002 Thermoelastic damping in fine-grained polysilicon flexural beam resonators J. Microelectromech. Syst. 11 499-504
20. Norris A N and Photiadis D M 2005 Thermoelastic relaxation in elastic structures, with applications to thin plates Q. J. Mech. Appl. Math. 58 143-63
21. Nayfeh A H and Younis M I 2004 Modeling and simulation of thermoelastic damping in microplates J. Micromech. Microeng. 14 1711-7
22. Wong S J, Fox C H J, McWilliam S, Fell C P and Eley R 2004 A preliminary investigation of thermoelastic damping in silicon rings J. Micromech. Microeng. 14 S108-13
23. Khisaeva Z and Ostoja-Starzewski M 2005 Thermoelastic damping in nanomechanical resonators with finite wave speeds J. Therm. Stresses (at press)
24. Bishop J E and Kinra V K 1996 Equivalence of the mechanical and entropic description of elastothermodynamic damping in composite materials Mech. Comp. Mater. Struct. 3 83-95
25. Bishop J E and Kinra V K 1997 Elastothermodynamic damping in laminated composites Int. J. Solids Struct. 34 1075-92
26. Ashby M F 2001 Materials Selection in Mechanical Design (Oxford: Butterworth Heinemann)
27. Srikar V T and Spearing S M 2003 Materials selection for microfabricated electrostatic actuators Sensors Actuators A 102 279-85
28. Ferguson A T, Li L, Nagaraj V T, Balachandran B, Piekarski B and DeVoe D L 2005 Modeling and design of composite free-free beam piezoelectric resonators Sensors Actuators A 118 63-9
29. Evoy S, Olkhovets A, Sekaric L, Parpia J M, Craighead H G and Carr D W 2000 Temperature-dependent internal friction in silicon nanoelectromechanical systems Appl. Phys. Lett. 77 2397-9
30. Sandberg R, Svendsen W, Molhave K and Boisen A 2005 Temperature and pressure dependence of resonance in multi-layer microcantilevers J. Micromech. Microeng. 15 1454-8
31. Stoldt C R, Carraro C, Ashurst W R, Gao D, Howe R T and Maboudian R 2002 A low-temperature CVD process for silicon carbide MEMS Sensors Actuators A 97-98 410-5
32. Yourgrau W, van der Merwe A and Raw G 1982 Treatise on Irreversible and Statistical Thermophysics (New York: Dover)
33. Ashby M F 1993 Criteria for selecting the components of composites Acta Metall. Mater. 41 1313-35
34. Chen G 1996 Nonlocal and nonequilibrium heat conduction in the vicinity of nanoparticles J. Heat Transfer 118 539-45