Attachment loss of micromechanical and nanomechanical resonators in the limits of thick and thin support structures

Journal of Applied Physics

Volumn 101, Issue 1, 2007, Pages

  Judge, John A ^a   Photiadis, Douglas M ^b   Vignola, Joseph F ^a   Houston, Brian H ^b   Jarzynski, Jacek ^b,c  

^a Catholic University of America ^*  (United States)

^b NAVAL RESEARCH LABORATORY   (United States)

^c SFA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC MEDIA; NANOMECHANICAL RESONATORS; PADDLE OSCILLATOR; THIN SUPPORT STRUCTURES;

CANTILEVER BEAMS; ENERGY DISSIPATION; RESONATORS; VIBRATIONS (MECHANICAL);

MICROELECTROMECHANICAL DEVICES;

EID: 33846363312     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2401271     Document Type: Article

References (36)

1. A. B. Hutchinson, P. Truitt, K. C. Schwab, L. Sekaric, J. M. Parpia, H. G. Craighead, and J. E. Butler, Appl. Phys. Lett. 0003-6951 10.1063/1.1646213 84, 972 (2004).
2. J. Yang, T. Ono, and M. Esashi, J. Microelectromech. Syst. 1057-7157 10.1109/JMEMS.2002.805208 11, 775 (2002).
3. J. Yang, T. Ono, and M. Esashi, Appl. Phys. Lett. 0003-6951 10.1063/1.1330225 77, 3860 (2000).
4. K. Y. Yasumura, T. D. Stowe, E. M. Chow, T. Pfafman, T. W. Kenney, B. C. Stipe, and D. Rugar, J. Microelectromech. Syst. 1057-7157 10.1109/84.825786 9, 117 (2000).
5. X. Liu, S. F. Morse, J. F. Vignola, D. M. Photiadis, A. S. M. H. Marcus, and B. H. Houston, Appl. Phys. Lett. 0003-6951 10.1063/1.1350599 78, 1346 (2001).
6. L. Lin, R. T. Howe, and A. P. Pisano, J. Microelectromech. Syst. 1057-7157 10.1109/84.709645 7, 286 (1998).
7. C. T.-C. Nguyen, IEEE Trans. Microwave Theory Tech. 0018-9480 10.1038/nature02658 47, 1486 (1999).
8. J. A. Judge, B. H. Houston, D. M. Photiadis, and P. C. Herdic, J. Sound Vib. 0022-460X 10.1016/j.jsv.2005.05.003 290, 1119 (2006).
9. B. Ilic, H. G. Craighead, S. Krylov, W. Senaratne, C. Ober, and P. Neuzil, J. Appl. Phys. 0021-8979 10.1063/1.1650542 95, 3694 (2004).
10. K. L. Ekinci, X. M. H. Huang, and M. L. Roukes, Appl. Phys. Lett. 0003-6951 10.1063/1.1755417 84, 4469 (2004).
11. A. Gupta, D. Akin, and R. Bashir, Appl. Phys. Lett. 0003-6951 10.1063/1.1667011 84, 1976 (2004).
12. T. R. Albrecht, P. Grütter, D. Horne, and D. Rugar, J. Appl. Phys. 0021-8979 10.1063/1.347347 69, 668 (1991).
13. T. D. Stowe, K. Yasamura, T. W. Kenny, D. Botkin, K. Wago, and D. Rugar, Appl. Phys. Lett. 0003-6951 10.1063/1.119522 71, 288 (1997).
14. H. Kawakatsu, S. Kawai, D. Saya, M. Nagashio, D. Kobayashi, H. Toshiyoshi, and H. Fujita, Rev. Sci. Instrum. 0034-6748 10.1063/1.1480459 73, 2317 (2002).
15. K. L. Ekinci and M. L. Roukes, Rev. Sci. Instrum. 0034-6748 10.1063/1.1927327 76, 061101 (2005).
16. Y.-H. Park and K. C. Park, J. Microelectromech. Syst. 1057-7157 10.1109/JMEMS.2004.825300 13, 238 (2004).
17. Y. Jimbo and K. Itao, J. Horological Inst. Jpn. 1180-4882 47, 1 (1968).
18. M. C. Cross and R. Lifshitz, Phys. Rev. B 0163-1829 10.1103/PhysRevB.64. 085324 64, 085324 (2001).
19. D. M. Photiadis and J. A. Judge, Appl. Phys. Lett. 0003-6951 10.1063/1.1773928 85, 482 (2004).
20. H. Hosaka, K. Itao, and S. Kuroda, Sens. Actuators, A 0924-4247 10.1016/0924-4247(95)01003-J 49, 87 (1995).
21. G. F. Miller and H. Pursey, Proc. R. Soc. London, Ser. A 223, 521 (1954).
22. J. Eichler, J. Acoust. Soc. Am. 0001-4966 10.1121/1.1918958 36, 344 (1964).
23. H. Haucke, X. Liu, J. F. Vignola, B. H. Houston, M. H. Marcus, and J. W. Baldwin, Appl. Phys. Lett. 0003-6951 10.1063/1.1921354 86, 181903 (2005).
24. C. R. Fuller, S. J. Elliot, and P. A. Nelson, Active Control of Vibration (Academic, San Diego, 1996), p. 29.
25. G. N. Bycroft, Philos. Trans. R. Soc. London, Ser. A 248, 327 (1956).
26. C. Kauffmann, J. Acoust. Soc. Am. 0001-4966 10.1121/1.421339 103, 1874 (1998).
27. J. X. Su and A. T. Moorhouse, J. Acoust. Soc. Am. 0001-4966 10.1121/1.1698861 115, 2075 (2004).
28. A. D. Pierce, Acoustics: An Introduction to its Physical Principles and Applications (Acoustical Society of America and American Institute of Physics, New York, 1981), p. 122.
29. D. J. Inman, Engineering Vibration, 2nd ed. (Prentice-Hall, Englewood Cliffs, NJ, 2001).
30. S. T. Hansen, A. Turo, F. L. Degertekin, and B. T. Khuri-Yakib, Proc.-IEEE Ultrason. Symp., 947 (2000).
31. J. F. Vignola, J. A. Judge, J. Jarzynski, M. Zalalutdinov, B. H. Houston, and J. W. Baldwin, Appl. Phys. Lett. 0003-6951 10.1063/1.2165186 88, 041921 (2006).
32. K. Kokubun, M. Hirata, M. Ono, H. Murekami, and Y. Toda, J. Vac. Sci. Technol. A 0734-2101 10.1116/1.574869 5, 2450 (1987).
33. K. Kokubun, M. Hirata, M. Ono, H. Murakami, and Y. Toda, J. Vac. Sci. Technol. A 0734-2101 10.1116/1.573275 3, 2184 (1985).
34. F. R. Blom, S. Bouwstra, M. Elwenspoek, and J. H. J. Fluitman, J. Vac. Sci. Technol. B 1071-1023 10.1116/1.586300 10, 19 (1992).
35. F. Fahy, Sound and Structural Vibration: Radiation, Transmission and Response (Academic, New York, 1985).
36. E. G. Williams, J. Acoust. Soc. Am. 0001-4966 10.1121/1.389412 73, 1520 (1983).