Thermoelastic loss in microscale oscillators

Applied Physics Letters

Volumn 80, Issue 7, 2002, Pages 1300-1302

  Houston, B H ^a   Photiadis, D M ^a   Marcus, M H ^a   Bucaro, J A ^a   Liu, Xiao ^a   Vignola, J F ^a  

^a NAVAL RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DISSIPATION MECHANISM; DOUBLE-PADDLE-OSCILLATORS; ENERGY LOSS; HIGH TEMPERATURE; HIGH-Q MODES; MICRO-ELECTRO-MECHANICAL; MICRO-SCALES; MODAL PARTICIPATION FACTORS; NANO-ELECTROMECHANICAL; NANOSCALE STRUCTURE; PHONON-PHONON SCATTERING; RELATIVE IMPORTANCE; SINGLE CRYSTAL SILICON; THEORETICAL PREDICTION; THERMOELASTIC DISSIPATION; THERMOELASTICS;

ENERGY DISSIPATION; INTERNAL FRICTION; OSCILLATORS (MECHANICAL); PHONONS;

THERMOELASTICITY;

EID: 79956024072     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1449534     Document Type: Article

References (18)

1. A. N. Cleland and M. L. Roukes, Nature (London) 392, 160 (1998). nat NATUAS 0028-0836
2. C. Nguyen, in Proceedings IEEE International Symposium on Circuits and Systems (IEEE, Hong Kong, 1997), p. 2825.
3. Z. Zhang, P. C. Hammel, M. Midzor, M. L. Roukes, and J. R. Childress, Appl. Phys. Lett. 73, 2036 (1998). apl APPLAB 0003-6951
4. R. D. Biggar and J. M. Parpia, Phys. Rev. B 56, 13638 (1997). prb PRBMDO 0163-1829
5. V. B. Braginsky, V. P. Mitrofanov, and V. I. Panov, Systems with Small Dissipation (University of Chicago Press, Chicago, 1985).
6. X. Liu, S. F. Morse, J. F. Vignola, D. M. Photiadis, A. Sarkissian, M. H. Marcus, and B. H. Houston, Appl. Phys. Lett. 78, 1346 (2001). apl APPLAB 0003-6951
7. C. L. Spiel and R. O. Pohl, Rev. Sci. Instrum. 72, 1482 (2001). rsi RSINAK 0034-6748
8. X. Liu, E. J. Thompson, B. E. White, Jr., and R. O. Pohl, Phys. Rev. B 59, 11767 (1999). prb PRBMDO 0163-1829
9. D. W. Carr, S. Evoy, L. Sekaric, H. G. Craighead, and J. M. Parpia, Appl. Phys. Lett. 75, 920 (1999); apl APPLAB 0003-6951
10. J. Yang, T. Ono, and M. Esashi, J. Vac. Sci. Technol. B 19, 551 (2001). jvb JVTBD9 0734-211X
11. C. Zener, Elasticity and Anelasticity of Metals (The University of Chicago Press, Chicago, 1948).
12. D. F. McGuigan, C. C. Lam, R. Q. Gram, A. W. Hoffman, D. H. Douglas, and H. W. Gutche, J. Low Temp. Phys. 30, 621 (1978). jlt JLTPAC 0022-2291
13. A. S. Nowick and B. S. Berry, Anelastic Relaxation in Crystalline Solids (Academic, New York, 1972).
14. R. N. Kleiman, G. K. Kaminsky, J. D. Reppy, R. Pindak, and D. J. Bishop, Rev. Sci. Instrum. 56, 2088 (1985). rsi RSINAK 0034-6748
15. B. E. White, Jr. and R. O. Pohl, Phys. Rev. Lett. 75, 4437 (1995). prl PRLTAO 0031-9007
16. X. Liu, B. E. White, Jr., R. O. Pohl, E. Iwanizcko, K. M. Jones, A. H. Mahan, B. N. Nelson, R. S. Crandall, and S. Veprek, Phys. Rev. Lett. 78, 4418 (1997). prl PRLTAO 0031-9007
17. EMIS Datareviews Series No. 4 - Properties of Silicon, edited by T. K. Ning (INSPEC, New York, 1988).
18. R. Lifshitz and M. L. Roukes, Phys. Rev. B 61, 5600 (2000). prb PRBMDO 0163-1829