Anchor loss reduction in resonant MEMS using MESA structures

Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007

Volumn , Issue , 2007, Pages 880-885

  Pandey, M ^a   Reichenbach, R B ^b   Zehnder, A T ^a   Lal, Amit ^b   Craighead, H G ^a  

^a Department of Obstetrics Gynecology   (United States)

^b Cornell University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; FREQUENCY RESPONSE; INTEGRATED CIRCUIT MANUFACTURE; OSCILLATORS (ELECTRONIC); RESONATORS;

ANCHOR LOSS REDUCTION; MESA STRUCTURES; QUALITY FACTORS;

MEMS;

EID: 34548129947     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2007.352159     Document Type: Conference Paper

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