Controlling energy dissipation and stability of micromechanical silicon resonators with self-assembled monolayers

Applied Physics Letters

Volumn 84, Issue 10, 2004, Pages 1765-1767

  Henry, Joshua A ^a   Wang, Yu ^a   Hines, Melissa A ^a  

^a Department of Molecular Biology and Genetics   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL BONDS; ENERGY DISSIPATION; FREQUENCIES; FREQUENCY DOMAIN ANALYSIS; INTERFEROMETERS; OSCILLATORS (ELECTRONIC); OXIDATION; SELF ASSEMBLY; SILICA; SILICON; SURFACE CHEMISTRY;

MICROMECHANICAL SILICON OSCILLATORS; QUALITY FACTOR DECAY;

RESONATORS;

EID: 1842581455     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1664015     Document Type: Article

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