Gaseous slip flow in long microchannels

Journal of Microelectromechanical Systems

Volumn 6, Issue 2, 1997, Pages 167-178

  Arkilic, Errol B ^b,d,e   Schmidt, Martin A ^a,b,c,f,g   Breuer, Kenneth S ^b,h  

^a IEEE

^b MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^c George Washington University ^*  (United States)

^d GEORGE WASHINGTON UNIVERSITY   (United States)

^e Sensoria Inc   (United States)

^f RENSSELAER POLYTECHNIC INSTITUTE   (United States)

^g Dept of Elec Eng and Comp Sci ^*

^h BROWN UNIVERSITY   (United States)

Author keywords

Fluid flow measurement; Microelectromechanical devices; Perturbation methods; Rarefied gas dynamics

Indexed keywords

CHANNEL FLOW; FLOW MEASUREMENT; GAS DYNAMICS; GASES; MASS TRANSFER; NUMERICAL ANALYSIS; PERTURBATION TECHNIQUES; PRESSURE EFFECTS;

MICROCHANNELS;

MICROELECTROMECHANICAL DEVICES;

EID: 0031170092     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.585795     Document Type: Article

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