Theory of thermoelastic damping in electrostatically actuated microstructures

Physical Review B - Condensed Matter and Materials Physics

Volumn 74, Issue 14, 2006, Pages

  De, Sudipto K ^a   Aluru, N R ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33750062245     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.74.144305     Document Type: Article

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