Impact of geometry on thermoelastic dissipation in micromechanical resonant beams

Journal of Microelectromechanical Systems

Volumn 15, Issue 4, 2006, Pages 927-934

  Candler, Rob N ^a   Duwel, Amy ^b   Varghese, Mathew ^b   Chandorkar, Saurabh A ^a   Hopcroft, Matthew A ^a   Park, Woo Tae ^a   Kim, Bongsang ^a   Yama, Gama ^c   Partridge, Aaron ^c,d   Lutz, Markus ^c,d   Kenny, Thomas W ^a  

^a STANFORD UNIVERSITY   (United States)

^b CHARLES STARK DRAPER LABORATORY   (United States)

^c BOSCH RESEARCH AND TECHNOLOGY CENTER   (United States)

^d SiTime Corporation   (United States)

Author keywords

Damping; Energy dissipation; Microelectromechanical systems (MEMS); Micromechanical resonator; Quality factor; Thermoelastic dissipation

Indexed keywords

COMPUTATIONAL GEOMETRY; COMPUTER SIMULATION; ENERGY DISSIPATION; MICROELECTROMECHANICAL DEVICES; OPTIMIZATION; THERMOELASTICITY;

MICROMECHANICAL RESONANT BEAMS; MICROMECHANICAL RESONATORS; QUALITY FACTOR; THERMOELASTIC DISSIPATION;

RESONATORS;

EID: 33747399833     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.879374     Document Type: Article

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