Fluid effects in vibrating micromachined structures

Journal of Microelectromechanical Systems

Volumn 14, Issue 4, 2005, Pages 770-781

  Kwok, Peter Y ^a   Weinberg, Marc S ^b   Breuer, Kenneth S ^c  

^a Foster Miller   (United States)

^b CHARLES STARK DRAPER LABORATORY   (United States)

^c BROWN UNIVERSITY   (United States)

Author keywords

Finite element method; Fluid damping; Hydrodynamic lift; Lumped parameter model; Microelectromechanical systems (MEMS); Micromechanical; Pressure relief hole; Rarefaction; Slip flow; Squeeze film; Tuning fork gyroscope (TFG)

Indexed keywords

DAMPING; FINITE ELEMENT METHOD; GYROSCOPES; HYDRODYNAMICS; MATHEMATICAL MODELS; PIPE FLOW; VIBRATIONS (MECHANICAL);

FLUID DAMPING; HYDRODYNAMIC LIFT; LUMPED PARAMETER MODEL; PRESSURE RELIEF HOLE; RAREFACTION; SLIP FLOW; SQUEEZE FILM; TUNING FORK GYROSCOPE;

MICROELECTROMECHANICAL DEVICES;

EID: 27144460891     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2005.845425     Document Type: Article

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