Review of template fabrication for nanoimprint lithography

Jixie Gongcheng Xuebao/Journal of Mechanical Engineering

Volumn 45, Issue 6, 2009, Pages 1-13

  Lan, Hongbo ^a,b   Ding, Yucheng ^a   Liu, Hongzhong ^a   Lu, Bingheng ^a  

^a XI'AN JIAOTONG UNIVERSITY   (China)

^b SHANDONG UNIVERSITY   (China)

Author keywords

3D template; Large area template; Nanoimprint lithography; Soft mold; Template fabrication

Indexed keywords

3D TEMPLATE; CRITICAL ISSUES; EMERGING MARKETS; FABRICATION METHOD; HIGH RESOLUTION; HIGH-THROUGHPUT METHOD; LARGE AREA TEMPLATE; MOLD MAKING; NANO-METER-SCALE; PATTERNED MEDIAS; ROADMAP; SOFT MOLD; TEMPLATE FABRICATION; WIRE GRID POLARIZERS;

FABRICATION; MOLDS; PHOTONIC CRYSTALS; TECHNOLOGICAL FORECASTING; THREE DIMENSIONAL;

NANOIMPRINT LITHOGRAPHY;

EID: 67650114817     PISSN: 05776686     EISSN: None     Source Type: Journal    
DOI: 10.3901/JME.2009.06.001     Document Type: Review

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