Nanoimprint in PDMS on glass with two-level hybrid stamp

Microelectronic Engineering

Volumn 85, Issue 1, 2008, Pages 210-213

  Carlberg, Patrick ^a   Montelius, Lars ^a   Tegenfeldt, Jonas ^a  

^a LUND UNIVERSITY   (Sweden)

Author keywords

Fluidics; Imprint; Nanoimprint lithography; PDMS; Process technology; Stamp

Indexed keywords

ETCHING; FLUIDICS; GLASS; STAMPING;

GLASS SUBSTRATES; IMPRINT POLYMERS; IMPRINTS; PROCESS TECHNOLOGY; STAMPS;

NANOIMPRINT LITHOGRAPHY;

EID: 36148952879     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.05.010     Document Type: Article

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