High resolution templates for step and flash imprint lithography

Journal of Microlithography, Microfabrication and Microsystems

Volumn 1, Issue 3, 2002, Pages 284-289

  Resnick, D J ^a   Dauksher, W J ^a   Mancini, D ^a   Nordquist, K J ^a   Ainley, E ^a   Gehoski, K ^a   Baker, J H ^a   Bailey, T C ^b   Choi, B J ^b   Johnson, S ^b   Sreenivasan, S V ^b   Ekerdt, J G ^b   Willson, C G ^b  

^a MOTOROLA INC   (United States)

^b The University of Texas at Austin

Author keywords

Flash; Imprint; Lithography; Step; Template

Indexed keywords

EID: 0141570607     PISSN: 15371646     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1508410     Document Type: Article

References (11)

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8. T. C. Bailey, D. J. Resnick, D. Mancini, K. J. Nordquist, W. J. Dauksher, E. Ainley, A. Talin, K. Gehoski, J. H. Baker, B. J. Choi, S. Johnson, M. Colburn, M. Meissl, S. V. Sreenivasan, J. G. Ekerdt, and C. G. Willson, Microelectron. Eng. (to be published).
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10. B. J. Choi, S. Johnson, M. Colbum, S. V. Sreenivasan, and C. G. Willson, Precis. Eng. 25(3), 192 (2001).
11. D. J. Resnick, T. C. Bailey, D. Mancini, K. J. Nordquist, W. J. Dauksher, E. Ainley, A. Talin, K. Gehoski, J. H. Baker, B. J. Choi, S. Johnson, M. Colbum, M. Meissl, S. V. Sreenivasan, J. G. Ekerdt, and C. G. Willson, Proc. SPIE (to be published).